Electrooptic Properties of Lead Zirconate Titanate Films Prepared on Silicon Substrate
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概要
- 論文の詳細を見る
The electrooptic (EO) properties of light propagated through lead zirconate titanate (PZT) films prepared on silicon (Si) substrates were successfully evaluated. Polycrystalline, {101}-oriented and {100}-oriented epitaxial PZT films with a thickness of approximately 2 μm were prepared on various types of Si substrate by chemical solution deposition. The anisotropic EO effect was observed in the polycrystalline and {101}-oriented PZT films. The in-plane and out-of-plane refractive indices of the {100}-oriented epitaxial PZT films changed with the type of substrate. The EO effect of the {100}-oriented epitaxial PZT film grown on a Si substrate was found to be more isotropic than those of the polycrystalline and {101}-oriented PZT films. The largest EO coefficients ($r_{\text{e}}=54$ pm/V and $r_{\text{c}}=60$ pm/V) were obtained in the {101}-oriented PZT film on the Si substrate.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-09-30
著者
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SHINOZAKI Kazuo
Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science
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KONDO Masao
Fujitsu Laboratories Ltd.
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Kurihara Kazuaki
Fujitsu Laboratories Inorganic Materials & Polymers Laboratory
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Sato Keisuke
Fujitsu Laboratories Ltd.
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ISHII Masatoshi
Fujitsu Limited & Fujitsu Laboratories Ltd.
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Wakiya Naoki
Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8588, Japan
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Ishii Masatoshi
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Kurihara Kazuaki
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Kondo Masao
Fujitsu Laboratories Limited, 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Shinozaki Kazuo
Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8588, Japan
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Sato Keisuke
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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