Crystallinity of Microscopically Patterned (Pb,La)(Zr,Ti)O3 Films on (001)Nb-Doped SrTiO3 Substrates Prepared by Chemical Solution Deposition Process with Resist Molds

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Arrays of lead lanthanum zirconate titanate (PLZT) precursor square pillars on (001) niobium-doped strontium titanate substrates were prepared by a chemical solution deposition process with resist molds. After firing the precursor pillars, arrays of PLZT ceramic square pillars with various widths ranging from 0.4 to 1.3 μm and heights of 0.5 and 0.7 μm were obtained. The relationship between the crystallinity and width of ceramic pillars was investigated by X-ray diffraction measurements. The crystallinity of PLZT pillars, evaluated on the basis of the peak intensity of the (002) reflection, showed an interesting pattern of behavior in a plot against the width, which is characterized by a sharp peak at a width of 0.7 μm and a sharp decrease in crystallinity at lower this width. Experimental results are interpreted in terms of the stress between the PLZT pillars and substrates for pillars with a width of ${>}0.7$ μm and the evaporation of the lead component for pillars with a width of ${<}0.7$ μm during the sintering process.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-01-15