Effect of Electrode Materials on Lead Lanthanum Zirconate Titanate with Heating under Reduced Atmosphere

概要

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To understand the ferroelectricity degradation of ferroelectric random access memory (FeRAM) capacitor under hydrogen atmosphere, reactions between lead lanthanum zirconate titanate (PLZT) and the electrode materials, such as platinum (Pt) and iridium oxide (IrO_2), were investigated by thermal analysis. The PLZT powder was decomposed by heating under Ar + 3%H_2 atmosphere at 1000℃ with lead (Pb) metal. PbO. ZrTiO_4 and TiO_2. The decomposed PLZT with Pb metal exhibited perovskite phase after annealing under air atrnosphere at 1000℃ and no pyrochlore phase was observed. We found that Pt reacted with the Pb precipitated from PLZT by heating under Ar + 3%H_2 atmosphere. Consequently, a large amount of PbPt alloy and a small amount of PtPb_4 alloy were formed. The formation temperature of the alloys was lower than the decomposition temperature of PLZT without Pt. Pt was directly involved in the decomposition of PLZT. However, no alloys of Ir and Pb were formed in the mixture of PLZT and IrO_2 under Ar + 3%H_2 atmosphere. The heat treatment of the mixture of PLZT and the electrode powders indicated that Pt promoted the decomposition of PLZT under Ar + 3%H_2 atmosphere and IrO_2 reduced the rate of the decomposition.
社団法人応用物理学会の論文
2001-09-30