15-P-02 Effect of Source Supply Patterns on Microstructure and Crystallinity of PZT Thin Film using Pulsed MOCVD Method

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概要

• 論文の詳細を見る
• 日本セラミックス協会の論文
• 2003-09-29

著者

• MIZUTANI Nobuyasu

  Tokyo Tech.

• Shinozaki K

  Tokyo Inst. Technol. Tokyo Jpn

• SAIKI Atsushi

  Tokyo Institute of Technology, Center for Advanced Materials Analysis

• WAKIYA Naoki

  Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science

• SHINOZAKI Kazuo

  Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science

• FUJITO Keisuke

  Tokyo Institute of Technology, Depeartment of Metallurgy and Ceramics Science

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