Fabrication Process of Fine Electrodes Using Shadow Mask Evaporation and Tip-Induced Local Oxidation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-07-30

著者

• Abe Takumi

  Department Of Neurosurgery Showa University School Of Medicine

• Abe Takumi

  Department Of Advanced Materials Science Graduate School Of Frontier Sciences University Of Tokyo

• AKAI Tomonori

  Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo

• SHIMOMURA Takeshi

  Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo

• KATO Midori

  Advanced Research Laboratory, Hitachi, Ltd.

• ISHIBASHI Masayoshi

  Advanced Research Laboratory, Hitachi, Ltd.

• HEIKE Seiji

  Advanced Research Laboratory, Hitachi, Ltd.

• HASHIZUME Tomihiro

  Advanced Research Laboratory, Hitachi, Ltd.

• ITO Kohzo

  Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo

• OKAI Makoto

  Displays Material Design Center, Hitachi, Ltd.

• Ishibashi M

  Advanced Research Laboratory Hitachi Ltd.

• Ishibashi Masayoshi

  Advanced Research Laboratory Hitachi Ltd.

• Ito K

  Univ. Tokyo Chiba Jpn

• Ito Kohzo

  Department Of Advanced Materials Science Graduate School Of Frontier Sciences The University Of Toky

• Kato M

  Japan Atomic Energy Res. Inst. Ibaraki Jpn

• Hashizume Tomihiro

  Advanced Research Laboratory Hitachi Lid.

• Shimomura Takeshi

  Department Of Organic And Polymer Materials Chemistry Tokyo University Of Agriculture And Technology

• Akai T

  Philips Analytical Application Laboratory

• Okai Makoto

  Displays Material Design Center Hitachi Ltd.

• Kato M

  Advanced Research Laboratory Hitachi Ltd.

• Kato Midori

  Advanced Research Laboratory Hitachi Ltd.

• Heike S

  Advanced Research Laboratory Hitachi Ltd.

• Heike Seiji

  Advanced Research Laboratory Hitachi Ltd.

• Akai Tomonori

  Department Of Advanced Materials Science Graduate School Of Frontier Sciences University Of Tokyo

• Shmomura T

  Department Of Organic And Polymer Materials Chemistry Tokyo University Of Agriculture And Technology

• SHIMOMURA Teruo

  Department of Electric Engineering, Faculty of Engineering, Kyushu Institute of Technology

• Hitosugi T.

  Department Of Superconductivity University Of Tokyo:(present Address)department Of Chemistry Univers

• Heike S.

  Advanced Research Laboratory Hitachi Ltd.

• Ishibashi M

  Advanced Research Laboratory Hitachi Ltd. Hatoyama

• Heike S

  Hitachi Ltd. Saitama Jpn

• Kato Masashi

  Department of Applied Physics, Graduate School of Engineering, Tohoku University

• Hashizume Tomihiro

  Advanced Research Lab., Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan

• Heike Seiji

  Advanced Research Lab., Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan

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