Nanofabrication Using Atomic Force Microscopy Lithography Combined with Optical Lithography
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-06-01
著者
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KATO Midori
Advanced Research Laboratory, Hitachi, Ltd.
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HEIKE Seiji
Advanced Research Laboratory, Hitachi, Ltd.
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HASHIZUME Tomihiro
Advanced Research Laboratory, Hitachi, Ltd.
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Ishibashi M
Advanced Research Laboratory Hitachi Ltd.
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Ishibashi Masayoshi
Advanced Research Laboratory Hitachi Ltd.
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Heike S
Advanced Research Laboratory Hitachi Ltd.
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- Initial Stage of Molecular Adsorption on Si(100) and H-terminated Si(100) Investigated by UHV-STM(STM-Si(001))
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- Evaluation of Thin Silicon Dioxide Layers by Beam Assisted Scanning Tunneling Microscope
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