Fabrication of Four-Probe Fine Electrodes Using Scanning-Probe Nanofabrication
スポンサーリンク
概要
- 論文の詳細を見る
We have fabricated four-probe Pt electrodes on a sapphire substrate by scanning-probe nanofabrication and reactive ion beam etching. Surface roughness, gap width and height of the fabricated electrodes were 0.3 nm, 150 nm and 4 to 5 nm, respectively. In order to test the quality of the fine electrodes, we evaluated the current through a multi-walled carbon nanotube (MWNT) placed on the electrodes. The measured two-probe resistance of the MWNT was 130 k$\Omega$ which included the contact resistance, while the leakage resistance was larger than 1 T$\Omega$.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Abe Takumi
Department Of Advanced Materials Science Graduate School Of Frontier Sciences University Of Tokyo
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SHIMOMURA Takeshi
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo
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Ishibashi Masayoshi
Advanced Research Laboratory Hitachi Ltd.
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Ito Kohzo
Department Of Advanced Materials Science Graduate School Of Frontier Sciences The University Of Toky
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Choi Byoung-ki
Advanced Research Laboratory Hitachi Ltd.
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Kato Midori
Advanced Research Laboratory Hitachi Ltd.
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Heike Seiji
Advanced Research Laboratory Hitachi Ltd.
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Akai Tomonori
Department Of Advanced Materials Science Graduate School Of Frontier Sciences University Of Tokyo
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Ito Kohzo
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Hashizume Tomihiro
Advanced Research Lab., Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan
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Choi Byoung-Ki
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan
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Kato Midori
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan
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Akai Tomonori
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Abe Takumi
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Shimomura Takeshi
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Heike Seiji
Advanced Research Lab., Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan
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