Barrier Properties of Thin ZrNx Films Prepared by Radical-Assisted Surface Reaction
スポンサーリンク
概要
- 論文の詳細を見る
We have prepared thin ZrNx films at low temperatures without substrate heating. In the proposed process, radical species generated by the catalytic decomposition of NH3 molecules react on the sputtered Zr film to form ZrNx. The barrier performance of the obtained 5-nm-thick ZrNx film is as good as that prepared by reactive sputtering at 350 °C, indicating the usefulness of the proposed method in forming ZrNx films at low temperatures. We have also demonstrated the general effectiveness of the method for ZrNx preparation in addition to the previous result of TiNx.
- 2011-05-25
著者
-
Noya Atsushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
-
Takeyama Mayumi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
-
Aoyagi Eiji
Institute For Materials Research Tohoku University
-
Sato Masaru
Department Of Applied Chemistry School Of Advanced Science And Engineering Faculty Of Science And En
-
Hayasaka Yuichirou
Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
関連論文
- Expansion Working of Brass Tubes by Plug Drawing
- The Mechanism of Correcting the Eccentricity of Brass Tubes by Sinking
- P-493 Studies on Constituents of Erythrina variegata (Leguminosae)
- A new amide from the leaves and twigs of Litsea auriculata
- Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers on SiO_2
- Phytochemical Flavones with the Antibacterial Activity against Methicillin-Resistant Staphylococcus aureus
- Thermostable ATP Regeneration System Using Polyphosphate Kinase from Thermosynechococcus elongatus BP-1 for D-Amino Acid Dipeptide Synthesis(BIOCHEMICAL ENGINEERING)
- Substrate Specificity of Thermostable D-Alanine-D-alanine ligase from Thermotoga maritima ATCC 43589
- D-Amino Acid Dipeptide Production Utilizing D-Alanine-D-Alanine Ligases with Novel Substrate Specificity(Enzymology, Protein Engineering, and Enzyme Technology)
- Effects of BaMO_3 (M = Zr, Sn) Nanorods on Critical Temperature of ErBa_2Cu_3O_y Films
- Evaluation of [111]-Textured Cu Layer Formed on Thin Nb Barrier Layer on SiO_2(Session 8A Silicon Devices V,AWAD2006)
- Evaluation of [111]-Textured Cu Layer Formed on Thin Nb Barrier Layer on SiO_2(Session 8A Silicon Devices V)
- Formation of Preferentially Oriented Cu [111] Layer on Nb [110] Barrier on SiO_2
- Structural Analyses of Cu[111] Layer on Nb[110] Barrier Formed on SiO_2(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
- Structural Analyses of Cu[111] Layer on Nb[110] Barrier Formed on SiO_2 (AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices))
- Formation of [111] Preferentially Oriented Cu Layer on [110] Nb Barrier on SiO_2
- Formation of [111] Preferentially Oriented Cu Layer on [110] Nb Barrier on SiO_2
- Transmission electron microscopy studies of grain boundaries in InP
- Oriented Growth of Cu(110) on YSi_(1100)/Si(100) and Diffusion Behavior in Copper Silicide Formation
- Auger Electron Spectroscopy Study on the Stability of the Interface between Deposited Cu_9Al_4 Intermetallic Compound Film and Si
- Auger Electron Spectroscopy Study on the Characterization and Stability of the Cu_9Al_4/TiN/Si System
- Thermal Stability of W_2N Compound Barrier in W/W_2N/poly-Si Gate Electrode Configuration(Electronic Materials)
- Effectiveness of Al_W Layer on Suppression of Spontaneous Reaction in Al/Al_W/W_2N/Si Contact Systems
- Solid-Phase Reactions in Polymorphic Epitaxial Contact Systems of Al/YSi_/Si
- Preparation of WN_x Films and Their Diffusion Barrier Properties in Cu/Si Contact Systems
- A New Method of Synthesis of Alkyl β-Glycosides Using Sucrose as Sugar Donor
- Thermal Stability of W_2N Compound Barrier in W/W_2N/poly-Si Gate Electrode Configuration
- Simultaneous determination of catechins in human saliva by high-performance liquid chromatography
- Preparation of Mo-N Films and Characterization of Oxide Barriers in NbN/Mo-N Josephson Junctions
- Structure-Based Modification of D-Alanine-D-Alanine Ligase from Thermotoga maritima ATCC 43589 for Depsipeptide Synthesis
- Transmissin Electron Microscopy Observation of Polymorphic Epitaxial Growth of YSi_ Layer in Al(001)/YSi_/Si(001) Systems
- Thermal Stability of W_2N Film as a Diffusion Barrier between Al and Si
- Cross-Sectional Observation of Fe_3O_Fe_2O_3 Intermediate Thin Films
- Stoichiometry of Ta-N Film and Its Application for Diffusion Barrier in the Al_3Ta/Ta-N/Si Contact System
- Interaction of Al_3Ta Intermetallic Compound Film with Si : Surfaces, Interfaces and Films
- Preparation and Characterizations of Al_3Ta Intermetallic Compound Films : Surfaces, Interfaces and Films
- Oxidation Behavior of Ta Thin Films as a Passivation Layer Deposited on Cu
- Oxidation Characteristics of Al–Ta Thin Alloy Films as a Passivation Layer on Cu
- Interfacial Reaction and Electrical Properties in the Sputter-Deposited Al/Ti Ohmic Contact to n-InP
- Effects of Al3Ta/TaN Bilayered Diffusion Barriers in the Al/Si Contact Systems
- Auger Electron Spectroscopy Study on the Stability and the Interfacial Reaction of Ta, Ta-N arnd TaN Films as a Diffusion Barrier between Cu_9Al_4 Film and Si
- Characterizations and Barrier Properties of WN_x Film in the Al_W/WN_x/Si Contact System
- Study on Tube-Expanding by Drawing of Phosphor Deoxidized Copper Tubes : Fourth Report : Relations between Contact Length and Dimensional Accuracy
- Study on Tube-Expanding by Drawing of Phosphor-Deoxidized Copper Tubes : Third Report : Relations between Tool Shapes and Changes in Wall-thickness
- Barrier Properties of Thin ZrNx Films Prepared by Radical-Assisted Surface Reaction
- Atomic Layer Deposition of Thin VNx Film from Tetrakis(diethylamido)vanadium Precursor
- Oxidation Characteristics of Thin Al--Mo Alloy Films with Various Compositions as Metal Capping Layer on Cu
- Study on Precision Clad Tube Working by Tube-Expanding
- Application of Extremely Thin ZrN Film as Diffusion Barrier between Cu and SiOC
- Reactively Sputtered Nanocrystalline ZrN Film as Extremely Thin Diffusion Barrier between Cu and SiO2
- Preferentially Oriented Cu[111] Layer Formed on Thin Nb Barrier on SiO2
- Evolution of Microstructures in Nanocrystalline VN Barrier Leading to Failure in Cu/VN/SiO2/Si Systems
- EFFECT OF CONSECUTIVE DOSING OF THIAMPHENICOL ON ITS OWN SERUM CONCENTRATION AND LIVER DRUG METABOLIZING ENZYME ACTIVITIES
- Reactions of Haloferrocenes. IV. The Condensation of Haloferrocenes with Various Carboxylic Acids in the Presence of Copper(I) Oxide
- Biochemical and pharmacological analysis of 2-((2-dimethylaminobenzyl)sulfinyl)benzimidazole (NC-1300), a new proton pump inhibitor.
- Ring-enlargement of methoxynaphthalenes with dichlorocarbene to benzotropone derivatives.
- The Reaction of Bromobenzene with Copper(I) Chloride - Pyridine Complex in Nitrobenzene
- Reactions of Haloferrocenes. III. The Reaction of Haloferrocenes with Copper(I) Benzenethiolate, Thiocyanate, Acetate, and Benzoate
- Syntheses and NMR Spectra of the Substituted Methylferrocenes
- Reactions of Haloferrocenes. II. Kinetic Studies of the Reaction of Haloferrocene with Copper (I) Chloride - Pyridine Complex
- Bromination of methoxybiphenylenes.
- Reaction of 1,2-dimethoxybiphenylene with dichlorocarbene. Chemical detection of the bond fixation in biphenylene derivatives.
- The syntheses of 4- and 5-(.ALPHA.- and .BETA.-naphthyl)tropolones.
- Characterization of silicon nitride thin films deposited by reactive sputtering and plasma-enhanced CVD at low temperatures
- Characterization of TiHfN ternary alloy films as a barrier between Cu plug and Si
- Preparation of nanocrystalline HfN