Oxidation Characteristics of Thin Al--Mo Alloy Films with Various Compositions as Metal Capping Layer on Cu
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概要
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The oxidation characteristics of Al--Mo alloy films (50 nm) deposited on Cu as a metal capping layer have been examined by varying the alloy composition. Cu oxidation from the surface and Cu out-diffusion toward the surface are well suppressed when using Al--Mo alloy with a Mo-rich composition. By using an Al15Mo85 alloy film, in which fine crystalline grains of AlMo3 are dispersed in an amorphous phase of the alloy, a well-separated layer configuration of oxide/Al--Mo alloy/Cu without excess Cu diffusion and/or preferential Al oxidation in the alloy layer is realized upon oxidation at 350 °C for 1 h in air. It is revealed that Al15Mo85 alloy films are a useful candidate material of a metal capping layer for Cu interconnects.
- 2012-05-25
著者
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Noya Atsushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Takeyama Mayumi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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