Vacuum Ultraviolet Laser-Induced Surface Alteration of SiO_2 : Beam Induced Physics and Chemistry
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-30
著者
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Inoue Yasuo
Lsi Research & Development Laboratory Mitsubishi Electric Corporation
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Sasaki W
Department Of Physics Toho University
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TAKIGAWA Yasuo
Department of Electronics, Osaka Electro-communication University
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KUROSAWA Kou
Department of Electrical Engineering, Miyazaki University
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SASAKI Wataru
Department of Electrical Engineering, University of Miyazaki
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Takigawa Yasuo
Department Of Electronic Engineering Osaka Electro-communication University
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KATTO Masahito
Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazak
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IZUMI Yoshitaka
NHK Science and Technical Research Laboratories
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Kurosawa K
Jst Satellite Miyazaki
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Kurosawa Kou
Department Of Electronics University Of Osaka Prefecture
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Kurosawa Kou
Department Of Electrical And Electronic Engineering University Of Miyazaki
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Sasaki Wataru
Department Of Electrical And Electronic Engineering And Photon Science Center University Of Miyazaki
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Katto Masahito
Cooperative Research Center University Of Miyazaki
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Iwai Yuki
Dep. Of Electronics And Bioinformatics Sci. And Technol. Meiji Univ.
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INOUE Yoshihide
Scientific Equipment Division
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Sasaki Wataru
Department Of Cardiology Akita Kumiai Hospital
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Kurosawa Kou
Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, 1-1 Gakuen Kibanadai Nishi, Miyazaki, Miyazaki 889-2192, Japan
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Takigawa Yasuo
Department of Electronic Engineering and Computer Science, Osaka Electro-Communication University, 18-8 Hatumachi, Neyagawa, Osaka 572-8530, Japan
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