Growth of β-FeSi_2 Thin Films on Silicon Substrates by Pulsed Laser Deposition Using ε-FeSi Alloy Targets
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-02-15
著者
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Ohmukai M
Department Of Electrical And Computer Engineering Akashi National College Of Technology
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TAKIGAWA Yasuo
Department of Electronics, Osaka Electro-communication University
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TODE Mayumi
Department of Electronics, Osaka Electro-communication University
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OHMUKAI Masato
Department of Electrical Engineering, Akashi College of Technology
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MUROYA Masaaki
Department of Electronic Engineering and Computer Science, Osaka Electro-Communication University
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KATTO Masahito
Cooperative Research Center, University of Miyazaki
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KUROSAWA Kou
JST Satellite Miyazaki
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Okuda M
Department Of Physics And Electronics University Of Osaka Prefecture
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Tode Mayumi
Department Of Electronic Engineering And Computer Science Osaka Electro-communication University
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Takigawa Y
Department Of Electronic Engineering Osaka Electro-communication University
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Okuda M
Department Of Electrical And Computer Engineering Akashi National College Of Technology
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