Silicon Precipitation Induced by Argon Excimer Laser in Surface Layers of Si_3N_4

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-08-01

著者

• OKUDA Masahiro

  Department of Pharmacy, Mie University Hospital, Faculty of Medicine, Mie University

• Okuda Masahiro

  Department Of Physics And Electronics College Of Engineering Osaka Prefecture University

• Okuda Masahiro

  京都大学医学部附属病院 薬剤部

• Ohmukai M

  Department Of Electrical And Computer Engineering Akashi National College Of Technology

• Okuda M

  The Faculty Of Environmental Engineering The University Of Kitakyushu

• Naito H

  Univ. Osaka Prefecture Osaka

• Naito Hiroyoshi

  Department Of Physics And Electronics University Of Osaka Prefecture

• Sasaki W

  Department Of Physics Toho University

• OHMUKAI Masato

  Department of Electrical Engineering, Akashi College of Technology

• KUROSAWA Kou

  Department of Electrical Engineering, Miyazaki University

• SASAKI Wataru

  Department of Electrical Engineering, University of Miyazaki

• MATSUSHITA Tatsuhiko

  Department o Electrical and Electronic Engineering, Osaka Sangyo University

• TSUNAWAKI Yoshiaki

  Department o Electrical and Electronic Engineering, Osaka Sangyo University

• NOZAWA Shigenori

  USHIO Inc.

• IGARASHI Tatsushi

  USHIO Inc.

• MATSUSHITA Tatsuhiko

  Osaka Sangyo University

• Okuda Masahiro

  Department Of Anesthesiology Mie University School Of Medicine

• Okuda Masahiro

  The Faculty Of Environmental Engineering The University Of Kitakyushu

• Igarashi T

  Research And Development Center Ushio Inc.

• Kurosawa K

  Jst Satellite Miyazaki

• Kurosawa Kou

  Department Of Electronics University Of Osaka Prefecture

• Kurosawa Kou

  Department Of Electrical And Electronic Engineering University Of Miyazaki

• Sasaki Wataru

  Department Of Electrical And Electronic Engineering And Photon Science Center University Of Miyazaki

• Ohmukai Masato

  Department Of Electrical And Computer Engineering Akashi National College Of Technology

• Matsushita Tatsuhiko

  Department Of Electrical Engineering And Electronics College Of Engineering Osaka Sangyo University

• Matsushita Tatsuhiko

  Department Of Electronics College Of Engineering University Of Osaka Prefecture

• Matsushita Tatsuhiko

  Department Of Traffic Machinery College Of Engineering Osaka Industrial University

• Naito Hiroyoshi

  Department Of Chemistry And Organosilicon Research Laboratory

• Matsushta Tatsuhiko

  Osaka Sangyo University

• Sasaki Wataru

  Department Of Cardiology Akita Kumiai Hospital

• Nozawa S

  Ushio Inc.

• Kurosawa Kou

  Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, 1-1 Gakuen Kibanadai Nishi, Miyazaki, Miyazaki 889-2192, Japan

• NAITO Hiroyoshi

  Department of Anatomy, Tokyo Dental College

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