Surface Alteration of Amorphous Si_3N_4 Films by ArF Excimer Laser Irradiation
スポンサーリンク
概要
- 論文の詳細を見る
ArF excimer laser induces silicon precipitation accompanied by nitrogen desorption on the surface of an amorphous Si_3N_4 film, when the laser fluence exceeds the critical fluence which is about 0.2 J/cm^2. The amount of nitrogen desorption and the silicon precipitation of the amorphous Si_3N_4 film increases with increasing laser fluence. The depth of the silicon precipitation on the amorphous Si_3N_4 film increases exponentially with increasing laser fluence.
- 社団法人応用物理学会の論文
- 1995-11-01
著者
-
IZAWA Yasukazu
Institute for Laser Technology
-
OKUDA Masahiro
University of Kitakyushu
-
Okuda Masahiro
Department Of Physics And Electronics College Of Engineering Osaka Prefecture University
-
Okuda Masahiro
京都大学医学部附属病院 薬剤部
-
Ohmukai M
Department Of Electrical And Computer Engineering Akashi National College Of Technology
-
Okuda M
The Faculty Of Environmental Engineering The University Of Kitakyushu
-
Okuda Masahiro
Department Of Physics And Electronics University Of Osaka Prefecture
-
Sasaki W
Department Of Physics Toho University
-
KUROSAWA Kou
Department of Electrical Engineering, Miyazaki University
-
Okuda Masahiro
University Hospital Pharmacy Mie University Graduate School Of Medicine
-
Okuda Masahiro
The Faculty Of Environmental Engineering The University Of Kitakyushu
-
Okuda M
Department Of Physics And Electronics University Of Osaka Prefecture
-
Kurosawa K
Jst Satellite Miyazaki
-
Kurosawa Kou
Department Of Electronics University Of Osaka Prefecture
-
Nakamae Kazuo
Institute Of Laser Engineering Osaka University:university Of Osaka Prefecture
-
Sasaki Wataru
Department Of Electrical And Electronic Engineering And Photon Science Center University Of Miyazaki
-
Ohmukai Masato
Department Of Electrical And Computer Engineering Akashi National College Of Technology
-
Nakahigashi K
Institute Of Laser Engineering Osaka University:university Of Osaka Prefecture
-
KUROSAWA Kou
Institute for Molecular Science
-
TAKIGAWA Yasuo
Institute of Laser Engineering, Osaka University
-
SASAKI Wataru
Institute of Laser Engineering, Osaka University
関連論文
- Direct Absorption Spectroscopy of CO_2 Using a Coherent White Light Continuum
- High Contrast HDR Video Tone Mapping Based on Gamma Curves
- Pharmacokinetics and pharmacodynamics of paclitaxel with carboplatin or gemcitabine, and effects of CYP3A5 and MDR1 polymorphisms in patients with urogenital cancers
- Eutectic α-Fe_2Si_5 and ε-FeSi Grown by the Czochralski Method from Arc Melt(Structure and Mechanical and Thermal Properties of Condensed Matter)
- Eutectic α-Fe_2Si_5 and ε-FeSi Formed in an Arc Furnace Showed a Three-Layer Structure : Structure and Mechanical and Thermal Properties of Condensed Matter
- Compression of 3D Models by Remesh on Texture Images
- Mechanical-Stress Induced Nd:YAG Active Quarter-Wave Plate
- 腎上皮細胞におけるクレアチニンの経細胞輸送
- Ablation and Amorphization of Crystalline Si by Femtosecond and Picosecond Laser Irradiation
- A Method for Determination of Rotational Viscosity and Pretilt Angle from Transient Current in Twisted Nematic Liquid Crystal Cells
- Transient Current Study of Ultraviolet-Light-Soaked States in n-Pentyl-p-n-Cyanobiphenyl
- Determination of Rotational Viscosity of Nematic Liquid Crystals from Transient Current: Numerical Analysis and Experiment
- Method for Determination of Rotational Viscosity in Nematic Liquid Crystals
- Generation of High Efficiency 2μm Laser Pulse from a Periodically Poled 5mol% MgO-Doped LiNbO_3 Optical Parametric Oscillator
- Silicon Precipitation Induced by Argon Excimer Laser in Surface Layers of Si_3N_4
- Reversible Optical Effects in Parylene-Coated Amorphous Ga-Se-S Films
- Observations of SiC Mirror Damage Induced by an Argon Excimer Laser
- Discussion on the Mechanism of Reversible Phase Change Optical Recording : Media
- Discussion on the Mechanism of Reversible Phase Change Optical Recording
- Pb-Amount Dependence of Copper and Oxygen Valence in Pb-Doped Bi-Sr-Ca-Cu-O Superconductors
- Studies of Crystallization Processes of Amorphous Chalcogenide Thin Films with Electrical Measurements : FUTURE TECHNOLOGY
- Crystallization Properties and Operative Regions of Erasable Optical Disk using Chalcogenide Films : MEDIA
- Effect of Ge Addition on Ga-Se-Te System Reversible Optical Recording Media
- Reversible Optical Recording Media with Ga-Se-Te System
- Transient Photocurrent in Amorphous (As_2Se_3):Te Thin Films
- Transient Photodischarge Characteristics of Photoconductors with Dispersive Transport
- Isothermal Photocurrent Transient Spectroscopy of Gap States in Amorphous Chalcogenide Semiconductors
- Gap State Spectroscopy in Amorphous Selenium Photoreceptors
- Parylene-Coated Photovoltaic Devices of In_xSe_ Film-ITO Structure
- Reversible Optical Effects in Parylene-Coated Amorphous Ga_xSe_ Films
- Effect of Photo-Induced Microcrystallization on In_x(Si_Se_)_ Film-ITO Solar Cells : I-3: NEW STRUCTURE AND ADVANCED MATERIAL (1)
- Peak Intensity Enhancement and Pulse Compression of a Picosecond Laser Pulse by Frequency Doubling with a Predelay
- Second-Harmonic Generation of a Picosecond Laser Pulse at High Intensities with Time Predelay
- Analysis and Evaluation of Zig-Zag Slab Laser Amplifier with Optical Diamond Geometry
- Development of HALNA DPSSL for the inertial fusion energy
- Diode-Pumped Glass Laser (10J x 10Hz) Development
- Quasi-CW 110kW AlGaAs Laser Diode Array Module for Inertial Fusion Energy Laser Driver : Optics and Quantum Electronics
- Design and Performance of a Diode-Pumped Nd:Silica-Phosphate Glass Zig-Zag Slab Laser Amplffier for Inertial Fusion Energy : Optics and Quantum Electronics
- Thermal- and Spectral-Characteristics of High-Power Quasi-Continuous Wave 940-nm InGaAs Diode Laser Arrays
- Tunable Near-Infrared and Visible All-Solid-State Optical Parametric Oscillator Amplifier System Based on Potassium Titanyl Phosphate Crystal
- Bandwidth Narrowing of an All-Solid-State Optical Parametric Oscillator Amplifier System
- Thermal Birefringence Effect on the Performance of a Laser-Diode Pumped Solid-State Laser
- Temperature Dependence of Emission Cross-section of Yb:glass
- High-Sensitivity Two-Dimensional Observation of Thermal Birefringence Compensation in Laser-Diode Pumped Nd:Glass Laser Rods
- Numerical Studies on Parameters for Stable Adiabatic Inversion by Gaussian and Square Pulses
- Measurement of Dipole Matrix Element of Atomic Gd Transitions using Rabi Flopping
- Selectivity and Efficiency of Laser Isotope Separation Processes of Gadolinium
- Selectivity Loss Due to Magnetic Field in Laser Isotope Separation of Gadolinium Based on Polarization Selection Rules
- Sub-10-fs Ti:sapphire Kerr-lens Mode Locked Oscillator
- Triple-Pass Ti : sapphire Pre-Amplifier with 60dB Gain for Laser Systems Using Chirped-Pulse Amplification
- Researches on Laser Isotope Separation of Gadolinium and Boron
- High-Power Operation of 1cm Laser Diode Bars on Funryu Heat Sink Cooled by Fluorocarbons
- Characteristics of Laser Diode Bar and Stack with Jet-Type, Water-Cooled Heatsink
- Single-Wavelength 5.6kW Direct Diode Laser with a High-Efficiency Beam Combination
- Analysis of Laser Beam Propagation Effects in Atomic Laser Isotope Separation
- Inhibition of Platelet Aggregation by Combined Therapy with Aspirin and Cilostazol after Off-Pump Coronary Artery Bypass Surgery
- JPEG Compatible Raw Image Coding Based on Polynomial Tone Mapping Model
- Extreme Ultraviolet Emission from Laser-Irradiated Low-Density Xe Targets
- Efficient High-Average-Power Operation of Q-Switched Cryogenic Yb:YAG Laser Oscillator
- New Potential of a Direct Laser-Diode-Pumped Yb:YAG Laser
- Quantum-Defect-Limited Operation of Diode-Pumped Yb : YAG Laser at Low Temperature
- Three-Wavelength Backscatter Measurement of Clouds and Aerosols Using a White Light Lidar System : Instrumentation, Measurement, and Fabrication Technology
- Gain and Spectral Characteristics of Broadband Optical Parametric Amplification
- Large molecules in high-intensity laser fields
- One-Photon Ionization of Liquid Water upon 193 nm Laser Irradiation
- Photolysis of CO_2 with 158 nm (F_2) Laser. Reactivity of O (^1D) with CH_4, CF_3H, and CF_3CH_3
- Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target
- An Application of Quadrupole to the Handling and Selection of Laser Fusion Fuel Containers
- Energetic Proton Generation in a Thin Plastic Foil Irradiated by Intense Femtosecond Lasers
- Hyperfine Structure Constants and Isotope Shift Determination in ZrI by Laser-Induced Fluorescence Spectroscopy
- A High Resolution Infrared Spectrum of C_2H_6 Using a Pb_Sn_Te Diode Laser
- Surface Alteration of Amorphous Si_3N_4 Films by ArF Excimer Laser Irradiation
- Imaging Characteristics of a Replicated Wolter Type. : I. X-Ray Mirror Designed for Laser Plasma Diagnostics
- Density Matched Coating for Laser Fusion Targets
- Fine-Structure Splitting in ν_4 of CF_4 Measured by Tunable Diode Laser
- Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging
- Spatial Effects of Laser Beam Propagation and Photoionization in a Multilevel Photoionization System
- μ-Law Based HDR Coding and Its Error Analysis
- High Contrast HDR Video Tone Mapping Based on Gamma Curves
- Detection Method of Fatigue Damage in Carbon Steel Using Laser Ultrasonics
- Fabrication of Low-Density Solid Xenon as Laser-Produced Plasma Extreme Ultraviolet Source
- Photonuclear Reaction of Iodine-129 with Laser-Compton Scattering Gamma-Rays Using Nd:YVO_4 Laser and Electron Storage Ring
- Laser Production of Extreme Ultraviolet Light Source for the Next Generation Lithography Application
- Characteristics of Laser Diode Bar and Stack with Jet-Type, Water-Cooled Heatsink
- Watermarking for HDR Image Robust to Tone Mapping
- Analysis of Parasitic Oscillation and Evaluation of Amplifier Module of Zig-Zag Slab Laser System
- Nondestructive Detection of Small Internal Defects in Carbon Steel by Laser Ultrasonics
- Analysis and Evaluation of Zig-Zag Slab Laser Amplifier with Optical Diamond Geometry
- Extreme Ultraviolet Emission from Laser-Irradiated Low-Density Xe Targets
- Analysis and Evaluation of Laser-Induced Damage of Zig-Zag Slab Laser Amplifier
- Efficient High-Average-Power Operation of Q-Switched Cryogenic Yb:YAG Laser Oscillator
- Ablation and Amorphization of Crystalline Si by Femtosecond and Picosecond Laser Irradiation
- Quantum-Defect-Limited Operation of Diode-Pumped Yb:YAG Laser at Low Temperature
- Effective Fluorescence Lifetime and Stimulated Emission Cross-Section of Nd/Cr:YAG Ceramics under CW Lamplight Pumping
- Tunable Near-Infrared and Visible All-Solid-State Optical Parametric Oscillator Amplifier System Based on Potassium Titanyl Phosphate Crystal
- Gain and Spectral Characteristics of Broadband Optical Parametric Amplification
- Magnetic Field Effect on Laser Isotope Separation Based on Polarization Selection Rules
- Measurement of Hyperfine Structure and Isotope Shift of Transitions in Gadolinium Using Blue Diode Laser
- Development of deuterium-tritium loading vessel for laser fusion target.
- Experimental Study on Soft X-Ray Radiation Emitted from a Laser-Heated Gold Cavity