Fabrication of Low-Density Solid Xenon as Laser-Produced Plasma Extreme Ultraviolet Source
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概要
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A low-density solid xenon (Xe) target has been developed as laser-produced plasma (LPP) extreme ultraviolet (EUV) source. Xe gas was cooled to below the condensation temperature, and liquid Xe was sprayed from a swirl atomizer into a low-pressure atmosphere. Microparticles of liquid Xe were rapidly cooled by their own latent heat of evaporation, and became a solid micrometer-sized powder. The most frequent particle diameter under an atomizing pressure of 0.3 MPa was 114 μm, and the apparent density was 0.2 g/cm3, 1/13 of the density of conventional solid Xe. The apparent production rate of the powder was 2.2 cm3/s.
- 2006-09-25
著者
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IZAWA Yasukazu
Institute for Laser Technology
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Mima Kunioki
Institue Of Laser Engineering Osaka University
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Aota Tatsuya
Institute Of Laser Engineering Osaka University
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Nagata Mizuho
Institute Of Laser Engineering Osaka University
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Miyanaga Noriaki
Institute Laser Engineering Osaka University
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Fujioka Shinsuke
Institute Of Laser Engineering Osaka University
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NAKAI Mitsuo
Institute of Laser Engineering, Osaka University
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Nagai Keiji
Institute Of Laser Engineering (ile) Osaka University
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Ueda Nobuyoshi
Institute Of Laser Engineering Osaka University
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Nishimura Hiroaki
Institute Of Laser Engineering Osaka University
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Nishihara Katsunobu
Institue Of Laser Engineering Osaka University
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Norimatsu Takayoshi
Institute Of Laser Engineering (ile) Osaka University
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Nagai Keiji
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Nagata Mizuho
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Fujioka Shinsuke
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Nakai Mitsuo
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Nishihara Katsunobu
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Aota Tatsuya
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Mima Kunioki
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Norimatsu Takayoshi
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Izawa Yasukazu
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Nishimura Hiroaki
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Ueda Nobuyoshi
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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NAKAI Mitsuo
Institute of Laser Engineering (ILE), Osaka University, 2-6 Yamada-oka, Osaka 565-0871 Japan
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