Ultrasoft X-Ray Emission Spectroscopic Analysis for Effects of Vacuum Ultraviolet Rare Gas Excimer Laser Irradiation on Silicon Nitride Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-11-01

著者

• Kameyama Akihiro

  Department of Applied Chemistry, Faculty of Engineering, Saitama University

• Kameyama Akihiro

  Department Of Electrical And Electronic Engineering University Of Miyazaki

• Kurmaev E

  Inst. Metal Physics Russian Acad. Sci. Yekaterinburg Rus

• Sasaki W

  Department Of Physics Toho University

• KURMAEV Ernst

  Institute of Metal Physics, Urals Division of the Russian Academy of Sciences

• TAKIGAWA Yasuo

  Department of Electronics, Osaka Electro-communication University

• KUROSAWA Kou

  Department of Electrical Engineering, Miyazaki University

• YOKOTANI Atsushi

  Department of Electrical and Electronic Engineering, University of Miyazaki

• SHAMIN Sergei

  Institute of Metal Physics, Russian Academy of Sciences-Ural Division

• DOLGIH Vitalij

  Institute of Metal Physics, Russian Academy of Sciences-Ural Division

• NAKAMAE Kazuo

  Department of Physics and Electronics, University of Osaka Prefecture

• SASAKI Wataru

  Department of Electrical Engineering, University of Miyazaki

• Takigawa Yasuo

  Department Of Electronic Engineering Osaka Electro-communication University

• Yokotani Atsushi

  Department Of Electrical And Electronic Engineering And Photon Science Center University Of Miyazaki

• Yokotani Atsushi

  Univ. Miyazaki Miyazaki Jpn

• Yokotani Atsushi

  Department Of Electric And Electronic Engineering Miyazaki University

• Kurmaev Ernst

  Institute Of Metal Physics Russian Academy Of Sciences Urals Division

• Kurosawa K

  Jst Satellite Miyazaki

• Kurosawa Kou

  Department Of Electronics University Of Osaka Prefecture

• Kurosawa Kou

  Department Of Electrical And Electronic Engineering University Of Miyazaki

• Shamin Sergei

  Institute Of Metal Physics Russian Academy Of Sciences-ural Division

• Nakamae Kazuo

  Institute Of Laser Engineering Osaka University:university Of Osaka Prefecture

• Sasaki Wataru

  Department Of Electrical And Electronic Engineering And Photon Science Center University Of Miyazaki

• Dolgih Vitalij

  Institute Of Metal Physics Russian Academy Of Sciences-ural Division

• Nakahigashi K

  Institute Of Laser Engineering Osaka University:university Of Osaka Prefecture

• Sasaki Wataru

  Department Of Cardiology Akita Kumiai Hospital

• Kurosawa Kou

  Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, 1-1 Gakuen Kibanadai Nishi, Miyazaki, Miyazaki 889-2192, Japan

• Takigawa Yasuo

  Department of Electronic Engineering and Computer Science, Osaka Electro-Communication University, 18-8 Hatumachi, Neyagawa, Osaka 572-8530, Japan

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