Time-Resolving Image Analysis of Drilling of Thin Silicon Substrates with Femtosecond Laser Ablation
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概要
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We have analyzed a drilling process with a femtosecond laser on a silicon surface in order to investigate the degree of the thermal effect during the dicing of a very thin silicon substrate (thickness: 50 μm). A femtosecond laser pulse ($E=30--500$ μJ/pulse, $\tau=200$ fs, $\lambda=780$ nm, $ f=10$ Hz) was focused on a thin silicon substrate using a lens with a focal length of 100 mm. An image-intensified charge-coupled device (CCD) camera with a high-speed gate of 200 ps was utilized to take images of a drilled hole during the drilling process. As a result, it was found that the smaller the pulse energy, the faster the formation of the hole. Therefore, we tried to estimate the degree of the thermal effect semi quantitatively by analyzing the rise time of the formation of the hole. By measuring the rise time in 8 kinds of metallic material, it was found that the rise time strongly correlates with the thermal conductivity in these materials. This knowledge is thought to be very important and useful for developing a dicing technique for thin silicon wafers using a femtosecond laser.
- 2005-11-15
著者
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Yokotani Atsushi
Department Of Electric And Electronic Engineering Miyazaki University
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KANAMITSU Yasushi
Department of Electrical and Electronic Engineering, University of Miyazaki
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Mukumoto Toru
Department Of Electrical And Electronic Engineering University Of Miyazaki
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Fukumoto Hideto
Department Of Electrical And Electronic Engineering University Of Miyazaki
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Kurosawa Kou
Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, 1-1 Gakuen Kibanadai Nishi, Miyazaki, Miyazaki 889-2192, Japan
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Mukumoto Toru
Department of Electrical and Electronic Engineering, University of Miyazaki, 1-1 Gakuen Kibanadai-Nishi, Miyazaki 889-2192, Japan
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Fukumoto Hideto
Department of Electrical and Electronic Engineering, University of Miyazaki, 1-1 Gakuen Kibanadai-Nishi, Miyazaki 889-2192, Japan
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Yokotani Atsushi
Department of Electrical and Electronic Engineering, University of Miyazaki, 1-1 Gakuen Kibanadai-Nishi, Miyazaki 889-2192, Japan
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Kanamitsu Yasushi
Department of Electrical and Electronic Engineering, University of Miyazaki, 1-1 Gakuen Kibanadai-Nishi, Miyazaki 889-2192, Japan
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