X-ray fluorescence study of organic-inorganic polymer conversion into ceramics induced by ion irradiation

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概要

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• Changes to the local and electronic structures of phenyltriethoxysilane ~PTES! films when irradiated at roomtemperature with gold ion concentrations of 531014 to 2.531015 cm22 and with carbon ion concentrations of531015 cm22 were studied using x-ray emission and photoelectron spectroscopies. The fluorescent ultrasoftsilicon LII,III and carbon Ka x-ray emission spectra of unirradiated and irradiated PTES films were measuredat the Advanced Light Source, and the Center for Advanced Microstructures and Devices. It is found that thePTES polymers that are exposed to ion doses higher than 531014 cm22 convert to Si:O:C ceramics. Annealingthe irradiated PTES polymer films at 1000 °C segregates the carbon atoms into sp2-like clusters.

• The American Physical Societyの論文

著者

• Kurmaev E

  Inst. Metal Physics Russian Acad. Sci. Yekaterinburg Rus

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