Etching and Optical Characteristics in GaAs/GaAlAs Surface Emitting Laser Fabrication Using a Novel Spray Etch
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概要
- 論文の詳細を見る
We present some results on a novel spray wet etch technique and surface characterization in forming short cavity structures for GaAs/GaAlAs vertical cavity surface emitting lasers. A completely flat epitaxial surface was obtained for the output-side mirror by selectively removing the GaAs substrate. The surface reflectivity was uniform and the reproducibility was drastically improved.
- 社団法人応用物理学会の論文
- 1992-05-30
著者
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Koyama Fumio
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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Iga Kenichi
Precision & Intelligence Lab., Tokyo Institute of Technology
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TANOBE Hiromasa
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Koyama Fumio
Precision And Intelligence Laboratory Microsystem Research Center Tokyo Institute Of Technology
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Tanobe Hiromasa
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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