Redundancy Technique for Ultra-High-Speed Static RAMs

概要

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A new redundancy technique especially suitable for ultra-high-speed static RAMs (SRAMs) has been developed. This technique is based on a decoding-method that uses two kinds of fuses without introducing any additional delay time. One fuse is initially ON and can be turned OFF afterwards, if necessary, by a cutting process using a focused ion beam (FIB). The other is initially OFF and can be turned ON afterwards by a connecting process using laser chemical vapor deposition (L-CVD). This technique is applied to a 64 kbit SRAM having a 1.5-ns access time. The experimental results obtained through an SRAM chip repaired using this redundancy technique show that this technique does not introduce any increase in the access time and does not reduce the operational margin of the SRAM.
社団法人電子情報通信学会の論文
1993-04-25