Microscopic Mechanism of Oxygen Transport during Thermal Silicon Oxidation

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概要

• 論文の詳細を見る
• 2006-09-13

著者

• KAGESHIMA Hiroyuki

  NTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation

• Akiyama Toru

  Dept. Of Physics Engineering Mie Univ.

• UEMATSU Masashi

  NTT Basic Research Laboratories, NTT Corporation

• KAGESHIMA Hiroyuki

  NTT LSI Laboratories

• ITO Tomonori

  Dept. of Physics Engineering, Mie Univ.

• Kageshima Hiroyuki

  Ntt Basic Research Laboratories

• Ito Tomonori

  Dept. Of Physics Engineering Mie Univ.

• Uematsu Masashi

  Ntt Basic Research Laboratories

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