Oxygen Trap Hypothesis in Silicon Oxide

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Akiyama Toru

  Mie Univ. Tsu Jpn

• KAGESHIMA Hiroyuki

  NTT LSI Laboratories

関連論文

• Origin of Dark Regions in Scanning Tunneling Microscopy Images Formed by Thermal Oxidation of Si(111) Surface
• Effect of Si/SiO_2 Interface on Silicon and Boron Diffusion in Thermally Grown SiO_2
• Mechanism of Potential Profile Formation in Silicon Single-Electron Transistors Fabricated Using Pattern-Dependent Oxidation : Semiconductors
• Effect of Oxidation-Induced Strain on Potential Profile in Si SETs Using Pattern-Dependent Oxidation (PADOX)
• Stress dependence of oxidation reaction at SiO2/Si interfaces during silicon thermal oxidation
• Microscopic Mechanism of Oxygen Transport during Thermal Silicon Oxidation
• Theoretical Investigation of Oxygen Diffusion in Compressively Strained High-Density α-Quartz
• First-Principles Analyses of O_2 Molecules around Ultrathin SiO_2/Si(100) Interface
• Oxygen Trap Hypothesis in Silicon Oxide
• Theoretical Study of Excess Si Emitted from Si-oxide/Si Interfaces
• Effect of Nitrogen on Diffusion in Silicon Oxynitride
• The Effect of Partial Pressure of Oxygen on Self-Diffusion of Si in SiO_2
• Interfacial Silicon Emission in Dry Oxidation-the Effect of H and Cl
• Interfacial Silicon Emission in Dry Oxidation -the Effect of H and Cl
• Oxidation Simulation of Heavily Phosphorus-Doped Silicon based on the Interfacial Silicon Emission Model : Semiconductors
• The Effect of Chlorine on Silicon Oxidation : Simulation based on the Interfacial Silicon Emission Model
• Phenomenological Theory on Si Layer-by-Layer Oxidation with Small Interfacial Islands
• Oxidation Simulation of (111) and (100) Silicon Substrates Based on the Interfacial Silicon Emission Model
• Simulation of High-Pressure Oxidation of Silicon Based on the Interfacial Silicon Emission Model
• Unified Simulation of Silicon Oxidation Based on the Interfacial Silicon Emission Model
• Transport Mechanism of Interfacial Network Forming Atoms during Silicon Oxidation

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