Spectroscopic Ellipsometry for the Identification of Paracrystallites in the Ultra-Thin Thermal CVD Hydrogenated Amorphous Silicon Films
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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Sakata I
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Sakata Isao
Electron Devices Division Electrotechnical Laboratory
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YAMANAKA Mitsuyuki
Electron Devices Division, Electrotechnical Laboratory
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HAZRA Sukti
Electron Devices Division, Electrotechnical Laboratory
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SUZUKI Eiichi
Electron Devices Division, Electrotechnical Laboratory
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Suzuki E
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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Hazra S
Electron Devices Division Electrotechnical Laboratory
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Yamanaka M
Electron Devices Division Electrotechnical Laboratory
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