Annealing Effects on Al and AN-Si Contacts with 3C-SiC

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-07-20

著者

• Daimon Hiroshi

  Graduate School Of Material Science Nara Advanced Institute Of Science And Technology

• Daimon Hiroshi

  Electrotechnical Laboratory

• Daimon Hiroshi

  Department Of Material Physics Faculty O Engineering Science Osaka University

• YOSHIDA Sadafumi

  Electrotechnical Laboratory

• YAMANAKA Mitsugu

  Electrotechnical Laboratory

• SAKUMA Eiichiro

  Electrotechnical Laboratory

• MISAWA Shunji

  Electrotechnical Laboratory

• Misawa S

  Tsukuba Institute For Super Materials Ulvac Japan Ltd.

• Yamanaka M

  Electron Devices Division Electrotechnical Laboratory

• Yoshida S

  Sharp Corp. Nara Jpn

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