Development of Scanning Probe Microscope for Auger Analysis
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概要
- 論文の詳細を見る
A combined system of the Auger electron analysis and the scanning tunneling microscope (STM) has been developed for both topographical observation and elemental analysis of surface. An STM tip works as a field-emission electron source inducing the Auger process. Conventionally used STM tip has a problem for the Auger measurements; Auger electrons from the sample surface are accelerated toward the sample in the strong electric field between the cathode tip and the sample. We constructed a new special tip with a shield electrode around the cathode tip to prevent the bending of the trajectories of Auger electrons. The field-emission electron was ejected from the cathode tip, and the special tip played a role of primary electron source for the Auger electron analysis. We detected silicon Auger electrons successfully from a clean Si(111) surface using a cylindrical mirror analyzer that located behind the special tip. This system works for both STM observation and Auger element analysis by exchanging the tip in vacuum.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Daimon Hiroshi
Graduate School Of Material Science Nara Advanced Institute Of Science And Technology
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Kanemitsu Yoshihiko
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Nagamura Toshihiko
Unisoku Co.
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Miyatake Yutaka
Graduate School Of Materials Science Nara Institute Of Science And Technology:unisoku Co. Ltd.
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Hattori Ken
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Miyatake Yutaka
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan
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Hattori Ken
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan
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