Formation of Self-Assembled Nanocrystalline Silicon Dots SiC14/H2 RF Plasma-Enhanced Chemical Vapor Deposition : Semiconductors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-11-15

著者

• Fujimura Yukihiro

  Department of Materials Science and Engineering, Nagoya Institute of Technology

• Ahmet Parhat

  National Institute For Materials Science

• SHIRAI Hajime

  Department of Functional Materials Science, Faculty of Engineering

• Fujimura Yukihiro

  Department Of Functional Materials Science Faculty Of Engineering Saitama University

• Koinuma Hideomi

  Materials And Structures Labolatory Tokyo Institute Of Technology

• Koinuma Hideomi

  Frontier Collaborative Research Center Tokyo Institute Of Technology:crest-japan Science And Tecimol

• Shirai Hajime

  Department Of Functional Materials And Science Faculty Of Engineering Saitama University

• JUNG Sughoan

  Department of Functional Materials Science, Faculty of Engineering, Saitama University

• Jung S

  Department Of Functional Materials Science Faculty Of Engineering Saitama University

• Ahmet Parhat

  National Institute For Material Science

• Fujimura Yukihiro

  Department Of Electronic Engineering Graduate School Of Engineering Gunma University

• Fujimura Y

  Department Of Functional Materials And Science Faculty Of Engineering Saitama University

• Fujimura Yukihiro

  Department of Functional Materials and Science, Faculty of Engineering, Saitama University

関連論文

• Magneto-Optical Spectroscopy of Anatase TiO_2 Doped with Co
• Inhibition of Branched-Chain α-Ketoacid Dehydrogenase Kinase by Thiamine Pyrophosphate at Different Potassium Ionic Levels
• Anisotropic Cooperative Jahn-Teller Effect and Metamagnetism in PrCu_2
• In-Plane Orientation and Polarity of ZnO Epitaxial Films on As-Polished Sapphire (α-Al_2O_3) (0001) Substrates Grown by Metal Organic Chemical Vapor Deposition
• Modified Method for Purifying Rat Liver Branched-Chain α-Ketoacid Dehydrogenase Complex
• High Mobility Thin Film Transistors with Trasparent ZnO Channels
• Synthesis of Novel P-Type Nanocrystalline Si Prepared from SiH_2Cl_2 and SiCl_4 for Window Layer of Thin Film Si Solar Cell
• Thin Film Growth and Surface Modification by keV Ion Beam
• EMI Reduction by Spread-Spectrum Clocking in Digitally-Controlled DC-DC Converters
• Nanocrystalline Silicon Dots Fabricated by Pulse RF Plasma-Enhanced Chemical Vapor Deposition of SiCl4-and-H2 Mixture
• Photochemical Identification of a Possible Adsorbed Pentacene Molecule on the SrTiO_3(001)
• Preparation of Atomically Smooth TiO_2 Single Crystal Surfaces and Their Photochemical Property
• The First Observation of ^1H-NMR Spectrum of Pentacene
• Local Magnetic Properties of Underdoped La_Sr_χ CuO_4 Single Crystal Probed by Scanning Superconducting Quantum Interference Device Microscopy : Superconductors
• Crystalline Electric Field and Metamagnetic Transition of PrCu_2
• X-Ray Magnetic Circular Dichroism and Structural Model for Co-Doped TiO_2 (Anatase) Thin Film (Condensed Matter : Structure, Mechanical and Thermal Properties)
• Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
• Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
• Growth and Characterization of Ferroelectric Pb(Zr, Ti)O_3 Films on Interface-Controlled CeO_2(111)/Si(111) Structures
• Single Grain and Single Grain Boundary Resistance of Pentacene Thin Film Characterized by Nano-scale Electrode Array
• Fabrication of Highly Oriented Rubrene Thin Films by the Use of Atomically Finished Substrate and Pentacene Buffer Layer
• Photo-Irresponsive Thin-Film Transistor with Mg_xZn_O Channel
• Metallic LaTiO_3 / SrTiO_3 Superlattice Films on the SrTiO_3(100) Surface
• Combinatorial Synthesis of Transition Metal Oxide Superlattices (特集:表面科学研究のコンビナトリアルケミストリー)
• Rapid Synthesis and Scanning Probe Analysis of Ba_xSr_TiO_3 Composition Spread Films on a Temperature Gradient Si(100) Substrate : Electrical Properties of Condensed Matter
• Epitaxial Growth of GaN Film on (La,Sr)(Al,Ta)_O3 (111) Substrate by Metalorganic Chemical Vapor Deposition
• Crack-free and c-Axis In-plane Aligned Superconducting Y_Ca_Ba_2Cu_3O_ Films for Terahertz Radiating Josephson Plasma Devices : Superconductors
• Stabilization Ba_2YCu_3O_ by Surface Coating with Plasma Polymerized Fluorocarbon Film : Electrical Properties of Condensed Matter
• Combinatorial Fabrication Process for a-Si:H Thin Film Transistors : Instrumentation, Measurement, and Fabrication Technology
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• Preparation of Carbon Nanohorn Aggregates by Cavity Arc Jet in Open Air : Nuclear Science, Plasmas, and Electric Discharges
• Direct Observation of Helical Polysilane Nanostructures by Atomic Force Microscopy
• Oxygen Plasma Treatment of Rubber Surface by the Atmospheric Pressure Cold Plasma Torch
• Fabrication of Highly Stable and Low Defect Density Amorphous Silicon Films at Low Substrate Temperature by Plasma Chemical Vapor Deposition Assisted with Piezoelectric Vibration
• Transport Properties of SrCuO_2 Thin Films with Artificially Modulated Structures
• Production of Fullerenes by Low Temperature Plasma Chemical Vaper Deposition under Atmospheric Pressure
• Preparation of New Poly (phenylene vinylene) Type Polymers by Ni-promoted Polycondensation and Their Photoluminescent Properties
• In Situ Preparation of Superconducting Thick Films from Rapidly Quenched Bi-Sr-Ca-Oxide Films and Surface-Oxidized Cu Plate
• Influence of Internal Electric Field on the Recombination Dynamics of Localized Excitons in an InGaN Double-Quantum-Well Laser Diode Wafer Operated at 450nm
• Recognition of the Atomic Terminating Layer in Perovskite Oxide Substrates by Reflection High Energy Electron Diffraction
• Field-Induced Ferroquadrupolar Ordering in RCu_2
• Growth of Crystal Silicon Films from Chlorinated Silanes by RF Plasma-Enhanced Chemical Vapor Deposition : Surfaces, Interfaces, and Films
• Low-Temperature Plasma-Enhanced Chemical Vapor Deposition of Crystal Silicon Film from Dichlorosilane
• Surface Chemistry of Si:H:Cl Film Formation by RF Plasma-Enhanced Chemical Vapor Deposition of SiH2Cl2 and SiCl4
• Anisotropic Thermal Expansion and Field-Induced Structural Phase Transition in PrCu_2
• Crystalline Electric Field and Metamagnetic Transition of PrCu2
• Metamagnetic Transition in PrCu_2 Studied by the de Haas-van Alphen Effect
• Photoluminesence Properties of Nanocrystalline Si Dots Fabricated by RF Plasma-Enhanced Chemical Vapor Deposition of SiCl_4 and H_2 Mixture : Optical Properties of Condensed Matter
• Formation of Self-Assembled Nanocrystalline Silicon Dots SiC14/H2 RF Plasma-Enhanced Chemical Vapor Deposition : Semiconductors
• Microcrystalline Silicon Film Growth Using a High-Density Microwave Plasma of SiH_4-and-D_2 Mixture
• Novel High Density Microwave Plasma Utilizing an Internal Spoke Antenna for Fast Deposition of Microcrystalline Silicon Films : Nuclear Science, Plasmas, Electric Dischanges
• Spatial Distribution of the High-Density Microwave Plasma and Its Effect on Crystal Silicon Film Growth
• Fast Deposition of Microcrystalline Silicon Using High-Density SiH_4 Microwave Plasma
• Inhibition of Branched-Chain α-Ketoacid Dehydrogenase Kinase by Thiamine Pyrophosphate at Different Potassium Ionic Levels
• Modified Method for Purifying Rat Liver Branched-Chain α-Ketoacid Dehydrogenase Complex
• Carbon Microstructures Synthesized Utilizing the RF Microplasma Jet at Atmospheric Pressure
• Effects of Chamber Wall Heating and Quartz Window on Fast Deposition of Microcrystalline Silicon Films by High-Density Microwave Plasma
• Efficient organic photovoltaic cells using hole-transporting MoO3 buffer layers converted from solution-processed MoS2 films
• Enhanced Crystallinity at Initial Growth Stage of Microcrystalline Silicon on Corning #7059 Glass Using SiH_2Cl_2
• Photo-Irresponsive Thin-Film Transistor with MgxZn1-xO Channel
• Steep Down-Slope Sawtooth Wave Generator Utilizing Two Triangluar Waves Exclusively
• Crystal Structures of Pt–Ru Alloy Schottky Contacts on ZnO by Combinatorial Ion Beam Deposition
• Improved Power Conversion Efficiency of Organic Photovoltaic Cell Fabricated by Electrospray Deposition Method by Mixing Different Solvents (Special Issue : Solid State Devices and Materials (1))
• Rapid Recrystallization of Amorphous Silicon Utilizing Very-High-Frequency Microplasma Jet at Atmospheric Pressure
• Synthesis of Well-Aligned Carbon Nanotubes Using a High-Density RF Inductive Coupling Plasma
• Synthesis of Novel P-Type Nanocrystalline Si Prepared from SiH2Cl2 and SiCl4 for Window Layer of Thin Film Si Solar Cell
• Combinatorial Fabrication and Characterization of Ternary La2O3–Mn2O3–Co3O4 Composition Spreads
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• The First Observation of 1H-NMR Spectrum of Pentacene
• Determination of Cation Distribution in Mn–Zn–Fe Ferrite by X-Ray Anomalous Scattering
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• Free-Carrier Effects on Zero- and One-Phonon Absorption Onsets of $n$-Type ZnO
• Structural and Optical Properties of ZnO Epitaxial Films Grown on Al2O3 ($11\bar{2}0$) Substrates by Metalorganic Chemical Vapor Deposition
• Fabrication of Liquid Crystal Polymer Films and Their Passivation Effect for Organic Devices
• Molecular Beam Epitaxy of Highly Oriented Pentacene Thin Films on an Atomically Flat Sapphire Substrate
• Plasma Parameters for Fast Deposition of Highly Crystallized Microcrystalline Silicon Films Using High-Density Microwave Plasma
• Photoluminescence and Optical Characterizations of Nanocrystalline Silicon Dots Formed by Plasma-Enhanced Chemical Vapor Deposition
• An in-situ Fabrication and Characterization System Developed for High Performance Organic Semiconductor Devices
• Effects of Single-Crystalline GaN Target on GaN Thin Films in Pulsed Laser Deposition Process
• High Mobility Thin Film Transistors with Transparent ZnO Channels
• Magneto-Optical Spectroscopy of Anatase TiO2 Doped with Co
• Recognition of the Atomic Terminating Layer in Perovskite Oxide Substrates by Reflection High Energy Electron Diffraction
• Increased Organic Photovoltaic Cell Efficiency by Incorporating a Nonionic Fluorinated Surfactant Cathode Interlayer

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