Combinatorial Fabrication Process for a-Si:H Thin Film Transistors : Instrumentation, Measurement, and Fabrication Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-01-15

著者

• KOINUMA Hideomi

  Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology

• Koinuma Hideomi

  Materials And Structures Labolatory Tokyo Institute Of Technology

• FUJIOKA Hiroshi

  Department of Applied Chemistry, The University of Tokyo

• Koinuma Hideomi

  Frontier Collaborative Research Center And Ceramics Materials And Structures Laboratory

• Koinuma Hideomi

  Ceramic Materials And Structures Laboratory:crest Japan Science And Technology Corporation

• Koinuma Hideomi

  Frontier Collaborative Research Center Tokyo Institute Of Technology:crest-japan Science And Tecimol

• AIYER Hemantkumar

  Ceramic Materials and Structures Laboratory

• NISHIOKA Daikichi

  Ceramic Materials and Structures Laboratory

• MARUYAMA Ryuichirou

  Ceramic Materials and Structures Laboratory

• SHINNO Hiroyuki

  Ceramic Materials and Structures Laboratory

• MATSUKI Nobuyuki

  Ceramic Materials and Structures Laboratory

• MIYAZAKI Kaori

  Ceramic Materials and Structures Laboratory

• Fujioka Hiroshi

  Department Of Applied Chemistry The University Of Tokyo

• Fujioka Hiroshi

  Department Of Applied Chemistry University Of Tokyo

関連論文

• Magneto-Optical Spectroscopy of Anatase TiO_2 Doped with Co
• In-Plane Orientation and Polarity of ZnO Epitaxial Films on As-Polished Sapphire (α-Al_2O_3) (0001) Substrates Grown by Metal Organic Chemical Vapor Deposition
• Ferromagnetism in Co-Doped TiO_2 Rutile Thin Films Grown by Laser Molecular Beam Epitaxy
• High Mobility Thin Film Transistors with Trasparent ZnO Channels
• X-Ray Photoelectron Spectroscopy Study of Hetero-Interface between Manganese Pnictide and Mn-Zn Ferrite
• Epitaxial Growth of InAs on Single-Crystalline Mn-Zn Ferrite Substrates
• In Situ Optical Diagnosis of Pulsed Laser Deposition and Oxidation of YBa_2Cu_3O_ Thin Films
• Photochemical Identification of a Possible Adsorbed Pentacene Molecule on the SrTiO_3(001)
• Preparation of Atomically Smooth TiO_2 Single Crystal Surfaces and Their Photochemical Property
• The First Observation of ^1H-NMR Spectrum of Pentacene
• Local Magnetic Properties of Underdoped La_Sr_χ CuO_4 Single Crystal Probed by Scanning Superconducting Quantum Interference Device Microscopy : Superconductors
• X-Ray Magnetic Circular Dichroism and Structural Model for Co-Doped TiO_2 (Anatase) Thin Film (Condensed Matter : Structure, Mechanical and Thermal Properties)
• Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
• Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
• Combinatorial Laser Molecular Beam Epitaxy (MBE) Growth of Mg-Zn-O Alloy for Band Gap Engineering
• Growth and Characterization of Ferroelectric Pb(Zr, Ti)O_3 Films on Interface-Controlled CeO_2(111)/Si(111) Structures
• Single Grain and Single Grain Boundary Resistance of Pentacene Thin Film Characterized by Nano-scale Electrode Array
• Fabrication of Highly Oriented Rubrene Thin Films by the Use of Atomically Finished Substrate and Pentacene Buffer Layer
• Photo-Irresponsive Thin-Film Transistor with Mg_xZn_O Channel
• Metallic LaTiO_3 / SrTiO_3 Superlattice Films on the SrTiO_3(100) Surface
• Magnetic Properties of Strain-Controlled SrRuO_3 Thin Films
• Combinatorial Synthesis of Transition Metal Oxide Superlattices (特集:表面科学研究のコンビナトリアルケミストリー)
• Magnetic and Transport Properties of Mn-Based Fractional-Layer Oxide Superlattices
• Rapid Synthesis and Scanning Probe Analysis of Ba_xSr_TiO_3 Composition Spread Films on a Temperature Gradient Si(100) Substrate : Electrical Properties of Condensed Matter
• InAs Quantum Dots Growth by Modified Droplet Epitaxy Using Sulfur Termination
• Effect of Impurity at SiO_2/Si Interface on 2D Hole Gas
• Generalized Grazing Incidence-Angle X-Ray Diffraction Studies on InAs Quantum Dots on Si(100) Substrates
• The Effect of Surface Cleaning by Wet Treatments and Ultra High Vacuum Annealing for Ohmic Contact Formation of P-Type GaN
• Spin State Analysis of Epitaxial Mn Compound Films Using High Resolution X-Ray Fluorescence
• Chemical States of Piled-up Phosphorus and Arsenic Atoms at the SiO2/Si Interface (Proceedings of the Second International Conference on SRMS(Synchrotron Radiation in Materials Science)(2))
• Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up
• Characterization of Phosphorus Pile-Up at the SiO_2/Si Interface
• Epitaxial Growth of GaN Film on (La,Sr)(Al,Ta)_O3 (111) Substrate by Metalorganic Chemical Vapor Deposition
• New Self-Organized Growth Method for InGaAs Quantum Dots on GaAs(001) Using Droplet Epitaxy
• Crack-free and c-Axis In-plane Aligned Superconducting Y_Ca_Ba_2Cu_3O_ Films for Terahertz Radiating Josephson Plasma Devices : Superconductors
• Stabilization Ba_2YCu_3O_ by Surface Coating with Plasma Polymerized Fluorocarbon Film : Electrical Properties of Condensed Matter
• Combinatorial Fabrication Process for a-Si:H Thin Film Transistors : Instrumentation, Measurement, and Fabrication Technology
• Ab initio Molecular Orbital Study on Hydrogen Radical Addition Reactions to Graphite Surface and Subsequent Initial Surface Process in Silane Plasma Chemical Vapor Deposition
• Direct Observation of Helical Polysilane Nanostructures by Atomic Force Microscopy
• Oxygen Plasma Treatment of Rubber Surface by the Atmospheric Pressure Cold Plasma Torch
• Fabrication of Highly Stable and Low Defect Density Amorphous Silicon Films at Low Substrate Temperature by Plasma Chemical Vapor Deposition Assisted with Piezoelectric Vibration
• Transport Properties of SrCuO_2 Thin Films with Artificially Modulated Structures
• Production of Fullerenes by Low Temperature Plasma Chemical Vaper Deposition under Atmospheric Pressure
• Preparation of New Poly (phenylene vinylene) Type Polymers by Ni-promoted Polycondensation and Their Photoluminescent Properties
• In Situ Preparation of Superconducting Thick Films from Rapidly Quenched Bi-Sr-Ca-Oxide Films and Surface-Oxidized Cu Plate
• Construction and Superfunction of Metal-oxide Nanostructures and Interfaces(Interfaces by various techniques)
• Recognition of the Atomic Terminating Layer in Perovskite Oxide Substrates by Reflection High Energy Electron Diffraction
• Formation of Self-Assembled Nanocrystalline Silicon Dots SiC14/H2 RF Plasma-Enhanced Chemical Vapor Deposition : Semiconductors
• Release Profiles of Recombinant Human Tumor Necrosis Factor from Ca^-Triggering Liposome in Vivo
• 143. GABOB Action on Salt Discharge of Nerve Cells as well as on the Conditioned Reflex of Man.
• Photo-Irresponsive Thin-Film Transistor with MgxZn1-xO Channel
• Influence of Heat Treatment on Dissolution and Masking Degree of Bitter Taste for a Novel Fine Granule System
• Application of Focal Cerebral Cooling for the Treatment of Intractable Epilepsy
• Room Temperature Layer by Layer Growth of GaN on Atomically Flat ZnO
• In-Plane Orientation and Polarity of ZnO Epitaxial Films on As-Polished Sapphire ($\alpha$-Al2O3) (0001) Substrates Grown by Metal Organic Chemical Vapor Deposition
• Heteroepitaxy of Hexagonal ZnS Thin Films Directly on Si (111)
• The First Observation of 1H-NMR Spectrum of Pentacene
• Determination of Cation Distribution in Mn–Zn–Fe Ferrite by X-Ray Anomalous Scattering
• Free-Carrier Effects on Zero- and One-Phonon Absorption Onsets of $n$-Type ZnO
• Structural and Optical Properties of ZnO Epitaxial Films Grown on Al2O3 ($11\bar{2}0$) Substrates by Metalorganic Chemical Vapor Deposition
• Ab initio Molecular Orbital Study on Hydrogen Radical Addition Reactions to Graphite Surface and Subsequent Initial Surface Process in Silane Plasma Chemical Vapor Deposition
• Fabrication of Liquid Crystal Polymer Films and Their Passivation Effect for Organic Devices
• Molecular Beam Epitaxy of Highly Oriented Pentacene Thin Films on an Atomically Flat Sapphire Substrate
• An in-situ Fabrication and Characterization System Developed for High Performance Organic Semiconductor Devices
• High Mobility Thin Film Transistors with Transparent ZnO Channels
• Magneto-Optical Spectroscopy of Anatase TiO2 Doped with Co
• Recognition of the Atomic Terminating Layer in Perovskite Oxide Substrates by Reflection High Energy Electron Diffraction

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