Fabrication of Liquid Crystal Polymer Films and Their Passivation Effect for Organic Devices

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概要

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• We have investigated the fabrication of liquid crystal polymer (LCP) thin films by thermal evaporation, and pulsed laser deposition (PLD). Due to the carbonization of LCP, no films were fabricated by thermal evaporation. The laser desorption time-of-flight mass spectra of a LCP target exhibited that the main ablation species were the fragments of the LCP in the case of low laser fluence, indicating the possibility of film fabrication by PLD. Thin films fabricated by PLD using a KrF excimer laser have a pale yellow color and a surface roughness of 1 nm, as measured by atomic force microscopy. The spectra obtained by Fourier transform infrared spectroscopy exhibit a peak corresponding to carbonyl bond at approximately 1730 cm-1, indicating a polyester structure similar to that of the original LCP. The breakdown field of the films was 1 MV/cm. We demonstrate that this film acts as a passivation films for organic field-effect transistors.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-06-15

著者

• Koinuma Hideomi

  Materials And Structures Labolatory Tokyo Institute Of Technology

• HAEMORI Masamitsu

  Materials and Structures Laboratory, Tokyo Institute of Technology

• Arai Keiichiro

  Materials And Structures Laboratory Tokyo Institute Of Technology

• Itaka Kenji

  Materials And Structures Laboratory Tokyo Institute Of Technology

• Yamaguchi Jun

  Materials And Structures Laboratory Tokyo Institute Of Technology

• Itaka Kenji

  Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan

• Arai Keiichiro

  Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan

• Yamaguchi Jun

  Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan

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