Ab initio Molecular Orbital Study on Hydrogen Radical Addition Reactions to Graphite Surface and Subsequent Initial Surface Process in Silane Plasma Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-12-15
著者
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Sato Kota
Department Of Veterinary Internal Medicine Faculty Of Agriculture Tottori University
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KOINUMA Hideomi
Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology
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Koinuma Hideomi
Ceramics Materials And Structures Laboratory Tokyo Institute Of Technology
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MIYAZAKI Kaori
Ceramic Materials and Structures Laboratory
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Sato Kota
Department Of Materials Science Faculty Of Engineering Yokohama National University
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SHINAGAWA Eiji
Department of Materials Science, Faculty of Engineering, Yokohama National University
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NAKAJIMA Kenji
Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology
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