Carbon Microstructures Synthesized Utilizing the RF Microplasma Jet at Atmospheric Pressure
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概要
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A novel rf microplasma jet was successfully generated at atmospheric pressure using a single-tube electrode. Preliminary results of the application of the microplasma jet to the synthesis of carbon microstructures using a CH4 and Ar mixture are presented with the following variables: the inner hole diameter of the needle tube electrode, the flow rate of methane, and substrate temperature. Carbon microstructures such as diamond particles, carbon nanowires, carbon nanotubes and cone-shaped crystalline Si, were synthesized with wide surface distributions by adjusting the deposition parameters. The relationship between the plasma state and the silicon and carbon microstructures and their surface distribution is demonstrated.
- 2005-06-15
著者
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Shirai Hajime
Department Of Functional Materials And Science Faculty Of Engineering Saitama University
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Kobayashi Tomohiro
The Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Kobayashi Tomohiro
The Institute of Physics and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Kikuchi Tomoyuki
Department of Functional Materials Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Sakura, Saitama 338-8570, Japan
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Yang Zhongshi
Department of Functional Materials Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Sakura, Saitama 338-8570, Japan
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Hatou Yasuhiro
Department of Functional Materials Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Sakura, Saitama 338-8570, Japan
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