Analysis of Spherical Carbon Particle Growth in Methane Plasma by Mie-Scattering Ellipsometry (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
The time evolution of polarization state of Mie-scattered light from carbon particles trapped in a methane plasma was measured by a newly developed ellipsometric method. By comparison of the experimental results with a model simulation, it is found that the particles grow by coating with hydrogenated amorphous carbon. It is also found that they have been isotropically and equally coated independent of their initial shape and diameter without homogeneous nucleation and that spherical and monodisperse particles have grown consequently.
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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HAYASHI Yasuaki
Department of Electronics and Information Science, Kyoto Institute of Technology
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Hayashi Yasuaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
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