Gas Phase Syntheses of Single-Walled Carbon Nanotubes by Chemical Vapor Deposition Using Hot filament and Plasma
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概要
- 論文の詳細を見る
Single-walled carbon nanotubes (SWNTs) have been successfully synthesized in the gas phase by hot filament chemical vapor deposition (HF CVD) and plasma-assisted-hot filament chemical vapor deposition (PHF CVD) in hydrogen-diluted ethylene and vaporized ferrocene. It was shown that a large amount of SWNTs can be synthesized by HF CVD. Moreover, it was demonstrated that PHF CVD enables the synthesis of a larger amount of SWNTs by the electrostatic confinement of fine particles for a long time in a plasma generated by dc (direct current) voltage application between a hot filament and a collecting plate.
- Japan Society of Applied Physicsの論文
- 2004-10-01
著者
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TANAKA Yoshihisa
LESCA Corporation
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MORITA Mutsuaki
LESCA Corporation
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Hayashi Yasuaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Nishino Shigehiro
Department Of Electrical Engineering Kyoto University
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Shinawaki Atsuhiro
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Nishino Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology, Sakyo-ku, Kyoto 606-8585, Japan
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Tanaka Yoshihisa
LESCA Corporation, Hatakeda-cho, Ibaraki-City, Osaka 567-0028, Japan
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