Large-Scale Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma-Enhanced Chemical Vapor Deposition : Surfaces, Interfaces, and Fiims
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概要
- 論文の詳細を見る
A new synthesis method of aligned carbon nanotubes on large substrates by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. Under the optimized conditions, well-aligned, high-density, uniform carbon nanotubes were successfully synthesized on the entire surface of a 3 x 3 cm^2 substrate by a one-slot antenna system. The practical value of an electron field emission density of more than 1 mA/cm^2 was obtained at -650 V. For large-scale synthesis of carbon nanotubes, we generated uniform surface-wave-excited microwave plasma of 12 cm diameter by a two-slot antenna system and confirmed the growth of carbon nanotubes in a preliminary experiment.
- 社団法人応用物理学会の論文
- 2002-12-15
著者
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Hayashi Hiroyuki
Department of Endodontics, Osaka Dental University
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HAYASHI Yasuaki
Department of Electronics and Information Science, Kyoto Institute of Technology
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NISHINO Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology
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HAYASHI Yasuaki
Kyoto Institute of Technology
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Hayashi Yasuaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Hayashi Yasuaki
Institute For Super Materials Ulvac Japan Ltd.
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Hayashi Yasuaki
Department Of Electronics Kyoto Institute Of Technology
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Hayashi Yasuaki
Department Of Neurology Okayama National Hospital
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Nishino Shigehiro
Department Of Electrical Engineering Kyoto University
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Hayashi Hiroyuki
Department Of Endodontics Osaka Dental University
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KOGA Mizuho
Department of Electronics and Information Science, Kyoto Institute of Technology
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KASHIRAJIMA Jun
Department of Electronics and Information Science, Kyoto Institute of Technology
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TAKAHASHI Kazumasa
Department of Electronics and Information Science, Kyoto Institute of Technology
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Hayashi Hiroyuki
Department Of Cardiology Kanazawa Medical University
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Hayashi Hiroyuki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Kashirajima Jun
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Hayashi Hiroyuki
Department Of Applied Chemistry Faculty Of Engineering Osaka Institute Of Technology
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Koga Mizuho
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Takahashi Kazumasa
Department Of Electronics And Information Science Kyoto Institute Of Technology
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HAYASHI Hiroyuki
Department of Advanced Energy, University of Tokyo, Kashiwa, Chiba 277-8561, Japan
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