Spectroscopic Ellipsometry of 3C-SiC Thin Films Grown on Si Substrates Using Organosilane Sources
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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NISHINO Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology
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Tsutsumi Koichi
J. A. Woollam Japan Corporation
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Kubo Naoki
Department of Nuclear Medicine, Hokkaido University Graduate School of Medicine
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Kitahara Koichi
R&d Group Wacker Nsce Corporation
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Kitahara Kuninori
Department Of Electronic And Control Systems Engineering Shimane University
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Kubo Naoki
Department Of Electronic And Control Systems Engineering Shimane University
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MORITANI Akihiro
Department of Electronic and Control Systems Engineering, Shimane University
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ASAHINA Shuichi
Shimane Institute for Industrial Technology
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KANAYAMA Nobuyuki
Shimane Institute for Industrial Technology
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SUZUKI Michio
J. A. Woollam Japan Corporation
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