Observation of Defects in Laser-Crystallized Polysilicon Thin Films by Hydrogenation and Raman Spectroscopy
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-01
著者
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NAKAJIMA Kazuo
Institute for Materials Research (IMR), Tohoku University
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Kitahara K
Interdisciplinary Faculty Of Science And Engineering Shimane University
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Kitahara Kuninori
Department Of Electronic And Control Systems Engineering Shimane University
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MORITANI Akihiro
Department of Electronic and Control Systems Engineering, Shimane University
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