Thermal Etching of 6H-SiC Substrate Surface
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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NISHINO Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology
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OHSHIMA Satoru
Department of Cardiology, Nagoya University Graduate School of Medicine
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NISHIGUCHI Taro
Department of Electronics and Information Science, Kyoto Institute of Technology
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