Ellipsometric Monitoring of First Stages of Diamond Nucleation in a Bias-Enhanced Surface-Wave-Excited Microwave Plasma
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概要
- 論文の詳細を見る
Changes of surface states of a substrate during diamond nucleation in a bias-enhanced microwave plasma have been monitored and analyzed by ellipsometry. In order to enable monitoring, a surface-wave-excited microwave plasma was applied, and it has been demonstrated that the generation of high-density diamond nuclei by appropriate negative-bias application and subsequent diamond growth are possible in the plasma. Evolution of the ellipsometric parameters was compared with a simulated calculation, and carbonization, incubation and nuclei growth stages have been distinguished.
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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HAYASHI Yasuaki
Department of Electronics and Information Science, Kyoto Institute of Technology
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NISHINO Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology
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Hayashi Yasuaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Nishino Shigehiro
Department Of Electrical Engineering Kyoto University
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Nakamura Hideto
Department of Electronics and Information Science, Kyoto Institute of Technology
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Nagahiro Masaaki
Department of Electronics and Information Science, Kyoto Institute of Technology
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Nagahiro Masaaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Nakamura Hideto
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Hayashi Yasuyuki
Department of Electronics and Information Science, Kyoto Institute of Technology
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