PE-CVD of Thermally Stable Low-k IMD Films Using Low-GWPC_5F_8
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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HAYASHI Yasuaki
Kyoto Institute of Technology
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Hayashi Yasuaki
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Hayashi Yasuaki
Institute For Super Materials Ulvac Japan Ltd.
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Hayashi Yasuaki
Department Of Electronics Kyoto Institute Of Technology
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Hayashi Yasuaki
Department Of Neurology Okayama National Hospital
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SHIRAFUJI Tatsuru
Department of Electronics and Information Science, Kyoto Institute of Technology
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NISHIONO Shigehiro
Department of Electronics and Information Science, Kyoto Institute of Technology
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Shirafuji Tatsuru
Department Of Electrical Engineering Kyoto University
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Shirafuji Tatsuru
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Nishiono Shigehiro
Department Of Electronics And Information Science Kyoto Institute Of Technology
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