Temperature Dependence of Nucleation Density of Chemical Vapor Deposition Diamond
スポンサーリンク
概要
- 論文の詳細を見る
The temperature dependence of the nucleation density of Chemical Vapor Deposition diamond was carefully investigated by ellipsometric monitoring. Substrates were pre-treated by rubbing with diamond powder and then by wiping off the residual powder until visually clean. Nucleation density was greater than 10^<10>/cm^2 in some ranges of temperature. It was also observed that nucleation density increased suddenly to 860℃ and then gradually decreased in the range of higher temperatures. The results were explained by a change in the adsorption state of the precursor, from a physical to a chemical.
- 社団法人応用物理学会の論文
- 1992-02-15
著者
-
HAYASHI Yasuaki
Kyoto Institute of Technology
-
Hayashi Yasuaki
Institute For Super Materials Ulvac Japan Ltd.
-
Hayashi Yasuaki
Department Of Electronics Kyoto Institute Of Technology
-
Hayashi Yasuaki
Department Of Neurology Okayama National Hospital
-
DRAWL William
Materials Research Laboratory, The Pennsylvania State University
-
MESSIER Russel
Materials Research Laboratory, The Pennsylvania State University
-
Messier R
Pennsylvania State Univ. Pennsylvania Usa
-
Messier Russel
Material Research Laboratory The Pennsylvania State University
-
Drawl William
Materials Research Laboratory The Pennsylvania State University
関連論文
- Experiments on Fine-Particle Plasmas for Observation of Critical Phenomena
- Microwave Power Dissipation and the Behavior of Flux Lines in the Tl-Ba-Ca-Cu-O System
- Reappearance of ESR in the Bi(Pb)-Sr-Ca-Cu-O System in the Superconducting State
- ESR and Nonresonant Microwave Absorption in a High-T_c Superconductor of the Tl-Ba-Ca-Cu-O System
- Characteristics of Holes Investigated by ESR in High-T_c phase of Bi(Pb)-Sr-Ca-Cu-O System
- Role of E/Z Photoisomerization of Cinnamate Side Chains Attached to Polymer Backbones in the Alignment Photoregulation of Nematic Liquid Crystals
- Design and Fabrication of InGaAs/GaAs Quantum Wires for Vertical-Cavity Surface-Emitting Lasers
- Liquid Crystal Alignment Regulation Using Photocrosslinkable Polymers with Azide Residues
- Spin Relaxation of Electrons in Strained-GaAs-Layer Photocathode of Polarized Electron Source
- Design and Fabrication of InGaAs/GaAs Quantum Wires for Vertical-Cavity Surface-Emitting Lasers
- Laser-Induced Oxygen Control in Small Region of YBa_2Cu_3O_y Poly- and Single Crystals, Observed by Microscopic IR Reflection
- Microscopic IR-Reflection Study of Oxygen Doping Effect Induced by Laser Irradiation on YBa_2Cu_3O_y, Surface
- Effects of Optical Confinement in Textured Antireflection Coating using ZnO Films for Solar Cells
- Evaluation of the Si-SiO_2 Interface by the Measurement of the Surface Recombination Velocity S by the Dual-Mercury Probe Method
- Hydrogen Annealing of Transparent Gate MOS Diodes
- Construction of GaAs Spin-Polarized Electron Source and Measurements of Electron Polarization
- Highly Aligned Growth of Carbon Nanotubes by RF-Plasma-Assisted DC Plasma Chemical Vapor Deposition at High Pressure
- Thin Film Monitoring with Ellipsometry in In-Line Processing Equipment
- Solar Cell Characteristics of High-Efficiency Polycrystalline Silicon Solar Cells Using SOG-Cast Wafers
- The Growth of Single Domain GaAs Films on Double Domain Si(001) Substrates by Molecular Beam Epitaxy
- Development of High Efficiency Polycrystalline Silicon Solar Cells Using Solar Grade Cast Wafers
- Formation of Zn-O Complexes During the Molecular Beam Epitaxial Growth of GaP on Si
- Structure Changes of Coulomb Crystal in a Carbon Fine-Particle Plasma
- Large-Scale Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma-Enhanced Chemical Vapor Deposition : Surfaces, Interfaces, and Fiims
- Simple Hexagonal Coulomb Crystal near a Deformed Plasma Sheath Boundary in a Dusty Plasma
- Increase of cytochrome c oxidase negative fibers in rimmed vacuole myopathy with inflammatory changes
- Synthesis of carbon-nanotube fine particles in a glow-discharge plasma and evaluation of hydrogen storage properties (Special issue: Plasma processing)
- PE-CVD of Thermally Stable Low-k IMD Films Using Low-GWPC_5F_8
- Analyses of Diamond Nucleation Processes on Carbonized Substrates
- In Situ Ellipsometric Monitoring of the Growth of Polycrystalline Silicon Thin Films by RF Plasma Chemical Vapor Deposition ( Plasma Processing)
- Temperature Dependence of Nucleation Density of Chemical Vapor Deposition Diamond
- Silicon Thin Film with Columnar Structure Formed by RF Diode Sputtering
- Strongly Coupled Plasmas under Microgravity