Investigation of Surface Damage in Si Exposed to Ar Plasma by Spectroscopic Ellipsometry and Grazing X-Ray Diffraction
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-01-15
著者
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YAMADA Takahiro
Department of Human Genetics, Nagasaki University School of Medicine
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MIZUNO Kaoru
Department of Physics, University of Durham, Science Laboratories, South Road
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Kitahara Kuninori
Department Of Electronic And Control Systems Engineering Shimane University
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MORITANI Akihiro
Department of Electronic and Control Systems Engineering, Shimane University
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Yamada Takahiro
Department Of Applied Chemistry School Of Engineering Tohoku University
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Kitahara Kuninori
Department Of Electronic And Control System Eng. Shimane University
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Moritani Akihiro
Department Of Electronic And Control System Eng. Shimane University
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Mizuno Kaoru
Department Of Material Science Faculty Of Science And Engineering Shimane University
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Kitahara Kuninori
Department of Electronic and Control Systems Engineering, Shimane University, 1060 Nishi-kawatsu, Matsue, Shimane 690-8504, Japan
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Mizuno Kaoru
Department of Material Science, Shimane University, 1060 Nishi-kawatsu, Matsue, Shimane 690-8504, Japan
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