Micro-Scale Characterization of Crystalline Phase and Stress in Laser-Crystallized Poly-Si Thin Films by Raman Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-11-15

著者

• Kodama K

  Chitose Inst. Sci. And Technol. Hokkaido Jpn

• HARA Akito

  Fujitsu Laboratories Limited

• Kitahara K

  Interdisciplinary Faculty Of Science And Engineering Shimane University

• Kitahara Kuninori

  Department Of Electronic And Control Systems Engineering Shimane University

• MORITANI Akihiro

  Department of Electronic and Control Systems Engineering, Shimane University

• OKABE Masahiro

  Fujitsu Laboratories Ltd.

• Hara A

  Fujitsu Laboratories Limited

• Hara Akito

  Fujitsu Lab. Ltd.

• Kitahara Kuninori

  Department Of Electronic And Control System Eng. Shimane University

• Moritani Akihiro

  Department Of Electronic And Control System Eng. Shimane University

• Moritani Akihiro

  Department Of Electronic And Control System Engineering Shimane University

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