Hydrogen-like Ultrashallow Thermal Donors in Silicon Crystals
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概要
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I investigated the electrical properties of annealed carbon- and nitrogen-rich Czochralski-grown silicon crystals using optical absorption and electron spin resonance, and I discovered the formation of a new kind of hydrogen-like donors, ultrashallow thermal donors (USTDs), made up of carbon, nitrogen and oxygen, and having very shallow energy levels. The donors' central-cell corrections are very small, with some of them having a negative central-cell correction peculiar to large cluster size defects. Based on the similarities between nitrogen-oxygen donors (D(N, O)s) and USTDs, I propose a formation mechanism and an atomic configuration for the USTDs. The USTDs are defects caused by interstitial carbons diffusing into the core of D(N, O) and modifying its electronic structure.
- 社団法人応用物理学会の論文
- 1995-07-15
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