Silicon-Hydrogen Bonds in Laser-Crystallized Polysilicon Thin Films and Their Effects on Electron Mobility
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-03-15
著者
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Kodama K
Chitose Inst. Sci. And Technol. Hokkaido Jpn
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HARA Akito
Fujitsu Laboratories Limited
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NAKAJIMA Kazuo
Fujitsu Laboratories Ltd.
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Nakajima Kensuke
Research Institute Of Electrical Communication Tohoku University
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Kitahara K
Interdisciplinary Faculty Of Science And Engineering Shimane University
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OKABE Masahiro
Fujitsu Laboratories Ltd.
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KITAHARA Kuninori
Deptartment of Electronic and Control Systems Engineering, Shimane University
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Hara A
Fujitsu Laboratories Limited
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Hara Akito
Fujitsu Lab. Ltd.
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Nakajima Kazuo
Fujitsu Laboratories Lid.
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