Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Non-Alkali Glass Substrate Using Diode-Pumped Solid-State Continuous Wave Laser Lateral Crystallization

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-06-15

著者

• Sasaki Nobuo

  Fujitsu Laboratories Limited

• HARA Akito

  Fujitsu Laboratories Limited

• TAKEI Michiko

  Fujitsu Laboratories Limited

• YOSHINO Kenichi

  Fujitsu Laboratories Limited

• TAKEUCHI Fumiyo

  Fujitsu Laboratories Limited

関連論文

• Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Non-Alkali Glass Substrate Using Diode-Pumped Solid-State Continuous Wave Laser Lateral Crystallization
• High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization
• High-Performance Polycrystalline Silicon Thin Film Transistors on Non-Alkali Glass Produced Using Continuous Wave Laser Lateral Crystallization : Semiconductors
• A New Approach for Form Polycrystalline Silicon by Excimer Laser Irradiation with a Wide Range of Energies
• Micro-Scale Characterization of Crystalline Phase and Stress in Laser-Crystallized Poly-Si Thin Films by Raman Spectroscopy
• Silicon-Hydrogen Bonds in Laser-Crystallized Polysilicon Thin Films and Their Effects on Electron Mobility
• Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation
• Selective Single-Crystalline-Silicon Growth at the Pre-defined Active Region of a Thin Film Transistor on Glass by Using Continuous Wave Laser Irradiation
• Influence of Grown-in Hydrogen on Thermal Donor Formation and Oxygen Precipitation in Czochralski Silicon Crystals
• Control of Nucleation and Solidification Direction of Polycrystalline Silicon by Excimer Laser Irradiation
• Intrinsic Gettering of Iron Impurities in Silicon Wafers
• Mo Contamination in p/p^+ Epitaxial Silicon Wafers
• Effect of Implanted Oxygen and Nitrogen on Mobility and Generation of Dislocation in SiGe/Si Heterostructure
• Selective Single-Crystalline-Silicon Growth on Non-Alkali Glass
• High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization
• Selective Single-Crystalline-Silicon Growth at the Pre-defined Active Region of a Thin Film Transistor on Glass by Using Continuous Wave Laser Irradiation
• Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Non-Alkali Glass Substrate Using Diode-Pumped Solid-State Continuous Wave Laser Lateral Crystallization

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