Electron Spin Resonance of Oxygen-Nitrogen Complex in Silicon

スポンサーリンク

概要

• 論文の詳細を見る

• We observed the electron spin resonance of oxygen-nitrogen complexes (ONCs) and found that they have C2V symmetry. Although they contain nitrogen, hyperfine interaction (hf) with nitrogen cannot be clearly observed. These characters of ONCs resemble thermal donors (TDs) very closely.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-01-20

著者

• Fukuda Tetsuo

  Fujitsu Ltd. Process Development Division

• Hara Akito

  Fujitsu Lab. Ltd.

• Hirai Iesada

  Fujitsu Laboratories Ltd.

• Hirai Iesada

  Fujitsu Laboratories Ltd., 1015 Kamikodanaka, Nakahara-ku, Kawasaki 211

• Miyabo Toru

  Fujitsu Laboratories Ltd., 1015 Kamikodanaka, Nakahara-ku, Kawasaki 211

関連論文

• High-Performance Polycrystalline Silicon Thin Film Transistors on Non-Alkali Glass Produced Using Continuous Wave Laser Lateral Crystallization : Semiconductors
• A New Approach for Form Polycrystalline Silicon by Excimer Laser Irradiation with a Wide Range of Energies
• Micro-Scale Characterization of Crystalline Phase and Stress in Laser-Crystallized Poly-Si Thin Films by Raman Spectroscopy
• Silicon-Hydrogen Bonds in Laser-Crystallized Polysilicon Thin Films and Their Effects on Electron Mobility
• Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation
• Influence of Grown-in Hydrogen on Thermal Donor Formation and Oxygen Precipitation in Czochralski Silicon Crystals
• Growth of Low Dislocation Density GaSb Single Crystals by Czochralski Method
• Intrinsic Gettering of Iron Impurities in Silicon Wafers
• Effect of Implanted Oxygen and Nitrogen on Mobility and Generation of Dislocation in SiGe/Si Heterostructure
• Distribution of Fe in an Intrinsic Gettered Silicon Wafer after Annealing at Supersaturation Temperature
• The Analysis of Slip Extension and Induced Stress in 300 mm Diameter Wafers on Three-point Symmetrical Support
• Hydrogen-like Ultrashallow Thermal Donors in Silicon Crystals
• Selective Single-Crystalline-Silicon Growth on Non-Alkali Glass
• High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization
• Selective Single-Crystalline-Silicon Growth at the Pre-defined Active Region of a Thin Film Transistor on Glass by Using Continuous Wave Laser Irradiation
• Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Non-Alkali Glass Substrate Using Diode-Pumped Solid-State Continuous Wave Laser Lateral Crystallization
• Electron Spin Resonance of Oxygen-Nitrogen Complex in Silicon
• Effects of Grown-in Hydrogen on Lifetime of Czochralski Silicon Crystals

もっと見る 閉じる

スポンサーリンク