Investigation of Surface Damage in Si Exposed to Ar Plasma by Spectroscopic Ellipsometry and Grazing X-Ray Diffraction
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概要
- 論文の詳細を見る
Low-damage processes in plasma-surface interactions, particularly lattice deformation and the degree of damage in a single-crystal Si surface exposed to Ar plasma, are investigated by spectroscopic ellipsometry (SE) and grazing X-ray diffraction. The dielectric function spectrum of the damaged Si layer in nano-depth is obtained by use of damage depth estimated by a method based on SE model analysis and confirmed by step etching combined with SE measurement. The third-derivative lineshape of the imaginary part $\varepsilon_{2}$ of the complex-dielectric function provides the damage dependences of interband transition energy and broadening parameter for the $E_{1}$ ($\Lambda_{3}\rightarrow\Lambda_{1}$) optical interband transition. The result shows that the surface damage proceeds through lattice expansion and relaxation. The lattice deformation in the damaged surface is also investigated by grazing X-ray diffraction. The X-ray rocking curve around (422)Si is asymmetric and involves small subsidiary curves corresponding to the lattice expansion and relaxation. These observations are in good agreement with the lattice deformation process obtained from the SE analysis.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-01-15
著者
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Yamada Takahiro
Department Of Applied Chemistry School Of Engineering Tohoku University
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Kitahara Kuninori
Department Of Electronic And Control System Eng. Shimane University
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Moritani Akihiro
Department Of Electronic And Control System Eng. Shimane University
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Mizuno Kaoru
Department Of Material Science Faculty Of Science And Engineering Shimane University
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Moritani Akihiro
Department of Electronic and Control Systems Engineering, Shimane University, 1060 Nishi-kawatsu, Matsue, Shimane 690-8504, Japan
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Mizuno Kaoru
Department of Material Science, Shimane University, 1060 Nishi-kawatsu, Matsue, Shimane 690-8504, Japan
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Yamada Takahiro
Department of Electronic and Control Systems Engineering, Shimane University, 1060 Nishi-kawatsu, Matsue, Shimane 690-8504, Japan
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