Analysis of Product Species in Capacitively Coupled C_5F_8 Plasma by Electron Attachment Mass Spectroscopy
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概要
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The decomposition and reaction products of C_5F_8 gas in a capacitively coupled plasma have been investigated by electron attachment mass spectroscopy (EAMS). Although only a few species are produced directly from C_5F_8 molecules by dissociative electron attachment, a variety of species appears after the discharge is ignited. The products comprise not only fragmented species but also polymerized species with larger masses than that of the parent molecule. It has been clarified from the energy spectra of the F^- signal that perfluoro-compounds such as CF_4, C_2F_6 and C_3F_8 are produced through the decomposition of C_5F_8, followed by secondary reactions in the gas phase. A tendency towards polymerization with increments of CF_2 units is also noted.
- 社団法人応用物理学会の論文
- 1999-08-01
著者
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Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
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Imai Shinichi
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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