Ion Impact Energy Distributions and Properties of Amorphous Hydrogenated Carbon Thin Films Deposited in a Self-Biased RF Discharge
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概要
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In a self-biased RF discharge in CH_4 we have investigated the relationships between the properties of hydro-genated amorphous carbon (a-C:H) film and ion impact energy distributions (IIEDs) measured by retarding-typeion energy analyzer at both parallel-plate electrodes. On the RF electrode a high-energy peak (HEP) due to the ion beam component was observed in IIED. The height of HEP decreased with increasing pressure at a given self-bias voltage (V_dc) and the central energy of HEP increased linearly with V_dc. at a given pressure. The microhardness of the film increased in proportion to the total incident ion current (TIIC) and central energy of HEP.The hydrogen content decreased and the surface morphology became fine as the central energy of HEP increased. From Raman and IR absorption spectra it turned out that there was an optimal energy of HEP to increase the content of the sp^3 bonding structure in the film.
- 社団法人応用物理学会の論文
- 1994-11-15
著者
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TATSUTA Toshiaki
R&D Center SAMCO International Inc.
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TSUJI Osamu
R&D Center SAMCO International Inc.
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Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
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Tsuji Osamu
R&d Center Samco International Inc.
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Tatsuta Toshiaki
R&d Center Samco International Inc.
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TATSUTA Toshiaki
R&D Center, Samco International Inc.,
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TSUJI Osamu
R&D Center, Samco International Inc.,
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