Fabrication of InP Submicron Pillars for Two-Dimensional Photonic Crystals by Reactive Ion Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Takeda Yoshikazu
Department Of Electrical Engineering Kyoto University:(present Address) Department Of Materials Nago
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Takeda Yoshikazu
Department Of Materials Science And Engineering Graduate School Of Engineering Nagoya University
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Takeda Yoshikazu
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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HASHIMOTO Masayuki
Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology
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FUJIWARA Yasufumi
Department of Materials Science and Engineering, Nagoya University
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HATATE Hitoshi
Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University
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SHIRAKAWA Hirofumi
Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University
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NAKANO Hirohiko
R&D Center SAMCO International Inc.
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TATSUTA Toshiaki
R&D Center SAMCO International Inc.
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TSUJI Osamu
R&D Center SAMCO International Inc.
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Hashimoto M
Department Of Macromolecular Science And Engineering Graduate School Of Science And Technology Kyoto
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Hashimoto M
Department Of Polymer Science And Engineering Faculty Of Textile Science Kyoto Institute Of Technolo
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Fujiwara Yasuaki
Department Of Mechanical Engineering Nagaoka University Of Technology
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Fujiwara Yuichiro
Department Of Applied Physics The University Of Tokyo
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Hashimoto Masayuki
Department Of Applied Science For Electronics And Materials Graduate School Of Engineering Sciences
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Tsuji O
Samco International Co. Ltd.
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Hatate Hitoshi
Department Of Materials Science And Engineering Graduate School Of Engineering Nagoya University
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Nakano H
R&d Center Samco International Inc.
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Takeda Y
Japan Fine Ceramics Center Nagoya Jpn
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Tsuji O
Samco International Inc. Kyoto Jpn
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Fujiwara Y
Univ. Tokyo Tokyo
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Shirakawa H
Department Of Materials Science And Engineering Graduate School Of Engineering Nagoya University
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Fujiwara Yasufumi
Department Of Materials Science And Engineering Graduate School Of Engineering Nagoya University
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Tatsuta T
Samco International Co. Ltd.
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