Electron Attachment Mass Spectrometry for the Detection of Electronegative Species in a Plasma

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-01

著者

• Tachibana Kunihide

  Department of Electronic Science and Engineering, Kyoto University

• Tachibana Kunihide

  Department Of Electronic Science And Engineering Kyoto University

• STOFFELS Winfred

  Department of Electronic Science and Engineering, Kyoto University

• STOFFELS Eva

  Department of Electronic Science and Engineering, Kyoto University

• Stoffels E

  Department Of Technical Physics Eindhoven University Of Technology

• Stoffels Winfred

  Department Of Electronic Science And Engineering Kyoto University

• Stoffels Eva

  Department Of Electronic Science And Engineering Kyoto University

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