High-Resolution Infrared Spectroscopy Applied to Powder Formation, Plasma Transport and Surface Processes (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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STOFFELS Winfred
Department of Electronic Science and Engineering, Kyoto University
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STOFFELS Eva
Department of Electronic Science and Engineering, Kyoto University
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Boer Hans
Department Of Physics Eindhoven University Of Technology
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HAVERLAG Marco
Department of Physics, Eindhoven University of Technology
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KROESEN Gerrit
Department of Physics, Eindhoven University of Technology
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HOOG Frits
Department of Physics, Eindhoven University of Technology
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Hoog Frits
Department Of Physics Eindhoven University Of Technology
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Haverlag Marco
Department Of Physics Eindhoven University Of Technology
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Kroesen Gerrit
Department Of Physics Eindhoven University Of Technology
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Stoffels Winfred
Department Of Physics Eindhoven University Of Technology
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Stoffels Eva
Department Of Physics Eindhoven University Of Technology
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Stoffels Winfred
Department Of Electronic Science And Engineering Kyoto University
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Stoffels Eva
Department Of Electronic Science And Engineering Kyoto University
関連論文
- Electron Attachment Mass Spectrometry for the Detection of Electronegative Species in a Plasma
- Angle Resolved Mass Spectrometry of Positive Ions Transmitted through High Aspect Ratio Channels in a Radio Frequency Discharge
- High-Resolution Infrared Spectroscopy Applied to Powder Formation, Plasma Transport and Surface Processes ( Plasma Processing)
- 材料プロセス用フルオロカーボンプラズマに関する基礎研究の進展 5.Polymerization in Fluorocarbon Plasmas
- Angle Resolved Mass Spectrometry of Positive Ions Transmitted through High Aspect Ratio Channels in a Radio Frequency Discharge